Guoheng Zhao

Person

Palo Alto, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
In-line monitoring of OLED layer thickness and dopant concentration
- Patent number 12,225,808
- Issue date Feb 11, 2025
- Applied Materials, Inc.
- Yeishin Tung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Image-based in-situ process monitoring
- Patent number 11,908,716
- Issue date Feb 20, 2024
- Applied Materials, Inc.
- Guoheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
In-line monitoring of OLED layer thickness and dopant concentration
- Patent number 11,856,833
- Issue date Dec 26, 2023
- Applied Materials, Inc.
- Yeishin Tung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and systems to measure properties of products on a moving b...
- Patent number 11,609,183
- Issue date Mar 21, 2023
- Applied Materials, Inc.
- Todd J. Egan
- G01 - MEASURING TESTING
Information Patent Grant
In-situ, real-time detection of particulate defects in a fluid
- Patent number 11,442,000
- Issue date Sep 13, 2022
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
Method and apparatus for detection of particle size in a fluid
- Patent number 11,441,992
- Issue date Sep 13, 2022
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- G01 - MEASURING TESTING
Information Patent Grant
Image based metrology of surface deformations
- Patent number 11,417,010
- Issue date Aug 16, 2022
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Simultaneous multi-directional laser wafer inspection
- Patent number 11,366,069
- Issue date Jun 21, 2022
- KLA-Tencor Corporation
- Guoheng Zhao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method and system for optical three dimensional topography measurement
- Patent number 11,287,248
- Issue date Mar 29, 2022
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Spectrum shaping devices and techniques for optical characterizatio...
- Patent number 11,226,234
- Issue date Jan 18, 2022
- Applied Materials, Inc.
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Imaging reflectometer
- Patent number 11,187,654
- Issue date Nov 30, 2021
- Applied Materials, Inc.
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
High sensitivity image-based reflectometry
- Patent number 11,156,566
- Issue date Oct 26, 2021
- Applied Materials, Inc.
- Guoheng Zhao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
High sensitivity image-based reflectometry
- Patent number 11,150,078
- Issue date Oct 19, 2021
- Applied Materials, Inc.
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Integrated reflectometer or ellipsometer
- Patent number 11,112,231
- Issue date Sep 7, 2021
- Applied Materials, Inc.
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Radial polarizer for particle detection
- Patent number 10,942,135
- Issue date Mar 9, 2021
- KLA Corporation
- Jenn-Kuen Leong
- G01 - MEASURING TESTING
Information Patent Grant
Imaging reflectometer
- Patent number 10,816,464
- Issue date Oct 27, 2020
- Applied Materials, Inc.
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Simultaneous multi-directional laser wafer inspection
- Patent number 10,739,275
- Issue date Aug 11, 2020
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Systems and methods for defect material classification
- Patent number 10,670,537
- Issue date Jun 2, 2020
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Method and system for optical three dimensional topography measurement
- Patent number 10,634,487
- Issue date Apr 28, 2020
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Digital lithography with extended field size
- Patent number 10,599,044
- Issue date Mar 24, 2020
- Applied Materials, Inc.
- Guoheng Zhao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Methods and apparatus for measuring height on a semiconductor wafer
- Patent number 10,495,446
- Issue date Dec 3, 2019
- KLA-Tencor Corporation
- Shifang Li
- G01 - MEASURING TESTING
Information Patent Grant
Wafer inspection
- Patent number 10,488,348
- Issue date Nov 26, 2019
- KLA-Tencor Corp.
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
Digital lithography with extended depth of focus
- Patent number 10,474,041
- Issue date Nov 12, 2019
- Applied Materials, Inc.
- Guoheng Zhao
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Dark-field inspection using a low-noise sensor
- Patent number 10,462,391
- Issue date Oct 29, 2019
- KLA-Tencor Corporation
- Yung-Ho Alex Chuang
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Grant
Systems and methods for defect material classification
- Patent number 10,234,402
- Issue date Mar 19, 2019
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for polarized wafer inspection
- Patent number 10,228,331
- Issue date Mar 12, 2019
- KLA-Tencor Corporation
- Sheng Liu
- G01 - MEASURING TESTING
Information Patent Grant
Generating an array of spots on inclined surfaces
- Patent number 9,945,792
- Issue date Apr 17, 2018
- KLA-Tencor Corporation
- Guoheng Zhao
- G02 - OPTICS
Information Patent Grant
Wafer inspection
- Patent number 9,915,622
- Issue date Mar 13, 2018
- KLA-Tencor Corp.
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Grant
TDI sensor in a darkfield system
- Patent number 9,891,177
- Issue date Feb 13, 2018
- KLA-Tencor Corporation
- Jijen Vazhaeparambil
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Image acquisition system, image acquisition method, and inspection...
- Patent number 9,886,764
- Issue date Feb 6, 2018
- KLA-Tencor Corporation
- Guoheng Zhao
- H04 - ELECTRIC COMMUNICATION TECHNIQUE

Patents Applicationslast 30 patents

Information Patent Application
OBLIQUE UNIFORM ILLUMINATION FOR IMAGING SYSTEMS
- Publication number 20240310292
- Publication date Sep 19, 2024
- KLA Corporation
- Guoheng Zhao
- H04 - ELECTRIC COMMUNICATION TECHNIQUE
Information Patent Application
GAS FLOW CONFIGURATIONS FOR SEMICONDUCTOR INSPECTIONS
- Publication number 20240230555
- Publication date Jul 11, 2024
- KLA Corporation
- Chunhai Wang
- G01 - MEASURING TESTING
Information Patent Application
GAS FLOW CONFIGURATIONS FOR SEMICONDUCTOR INSPECTIONS
- Publication number 20240133825
- Publication date Apr 25, 2024
- KLA Corporation
- Chunhai Wang
- G01 - MEASURING TESTING
Information Patent Application
IN-LINE MONITORING OF OLED LAYER THICKNESS AND DOPANT CONCENTRATION
- Publication number 20240130210
- Publication date Apr 18, 2024
- Applied Materials, Inc.
- Yeishin Tung
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND SYSTEMS TO MEASURE PROPERTIES OF MOVING PRODUCTS IN DEV...
- Publication number 20230213444
- Publication date Jul 6, 2023
- Applied Materials, Inc.
- Todd J. Egan
- G01 - MEASURING TESTING
Information Patent Application
Single-Material Waveplates for Pupil Polarization Filtering
- Publication number 20230187241
- Publication date Jun 15, 2023
- KLA Corporation
- Chong Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Reflective Waveplates for Pupil Polarization Filtering
- Publication number 20230187242
- Publication date Jun 15, 2023
- KLA Corporation
- Chong Shen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR DETECTION OF PARTICLE SIZE IN A FLUID
- Publication number 20230060205
- Publication date Mar 2, 2023
- Applied Materials, Inc.
- Mehdi VAEZ-IRAVANI
- G01 - MEASURING TESTING
Information Patent Application
IMAGE-BASED IN-SITU PROCESS MONITORING
- Publication number 20220367217
- Publication date Nov 17, 2022
- Applied Materials, Inc.
- Guoheng Zhao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
IMAGE BASED METROLOGY OF SURFACE DEFORMATIONS
- Publication number 20220327725
- Publication date Oct 13, 2022
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHODS AND SYSTEMS TO MEASURE PROPERTIES OF PRODUCTS ON A MOVING B...
- Publication number 20220057323
- Publication date Feb 24, 2022
- Applied Materials, Inc.
- Todd J. Egan
- G01 - MEASURING TESTING
Information Patent Application
METHOD AND APPARATUS FOR DETECTION OF PARTICLE SIZE IN A FLUID
- Publication number 20210372911
- Publication date Dec 2, 2021
- Applied Materials, Inc.
- Mehdi VAEZ-IRAVANI
- G01 - MEASURING TESTING
Information Patent Application
IMAGE BASED METROLOGY OF SURFACE DEFORMATIONS
- Publication number 20210366143
- Publication date Nov 25, 2021
- Applied Materials, Inc.
- Mehdi Vaez-Iravani
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
HIGH SENSITIVITY IMAGE-BASED REFLECTOMETRY
- Publication number 20210302149
- Publication date Sep 30, 2021
- Applied Materials, Inc.
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
HIGH SENSITIVITY IMAGE-BASED REFLECTOMETRY
- Publication number 20210302330
- Publication date Sep 30, 2021
- Applied Materials, Inc.
- Guoheng Zhao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IN-LINE MONITORING OF OLED LAYER THICKNESS AND DOPANT CONCENTRATION
- Publication number 20210226182
- Publication date Jul 22, 2021
- Applied Materials, Inc.
- Yeishin Tung
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPECTRUM SHAPING DEVICES AND TECHNIQUES FOR OPTICAL CHARACTERIZATIO...
- Publication number 20210223102
- Publication date Jul 22, 2021
- Applied Materials, Inc.
- Guoheng Zhao
- G02 - OPTICS
Information Patent Application
IN-SITU, REAL-TIME DETECTION OF PARTICULATE DEFECTS IN A FLUID
- Publication number 20210181084
- Publication date Jun 17, 2021
- Applied Materials, Inc.
- Mehdi VAEZ-IRAVANI
- G01 - MEASURING TESTING
Information Patent Application
INTEGRATED REFLECTOMETER OR ELLIPSOMETER
- Publication number 20210131786
- Publication date May 6, 2021
- Applied Materials, Inc.
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
IMAGING REFLECTOMETER
- Publication number 20200355609
- Publication date Nov 12, 2020
- Appiied Materials, Inc,
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
SIMULTANEOUS MULTI-DIRECTIONAL LASER WAFER INSPECTION
- Publication number 20200333262
- Publication date Oct 22, 2020
- KLA-Tencor Corporation
- Guoheng Zhao
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
IMAGING REFLECTOMETER
- Publication number 20200232916
- Publication date Jul 23, 2020
- Applied Materials, Inc.
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
Method and System for Optical Three Dimensional Topography Measurement
- Publication number 20200217651
- Publication date Jul 9, 2020
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
Radial Polarizer for Particle Detection
- Publication number 20200150054
- Publication date May 14, 2020
- KLA Corporation
- Jenn-Kuen Leong
- G01 - MEASURING TESTING
Information Patent Application
Systems and Methods for Defect Material Classification
- Publication number 20190212277
- Publication date Jul 11, 2019
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND APPARATUS FOR POLARIZED WAFER INSPECTION
- Publication number 20180364177
- Publication date Dec 20, 2018
- KLA-Tencor Corporation
- Sheng Liu
- G01 - MEASURING TESTING
Information Patent Application
Method and System for Optical Three Dimensional Topography Measurement
- Publication number 20180209784
- Publication date Jul 26, 2018
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
Systems and Methods for Defect Material Classification
- Publication number 20180188188
- Publication date Jul 5, 2018
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING
Information Patent Application
Wafer Inspection
- Publication number 20180164228
- Publication date Jun 14, 2018
- KLA-Tencor Corporation
- Anatoly Romanovsky
- G01 - MEASURING TESTING
Information Patent Application
SIMULTANEOUS MULTI-DIRECTIONAL LASER WAFER INSPECTION
- Publication number 20180073993
- Publication date Mar 15, 2018
- KLA-Tencor Corporation
- Guoheng Zhao
- G01 - MEASURING TESTING

Guoheng Zhao

Person

Patents Grantslast 30 patents

In-line monitoring of OLED layer thickness and dopant concentration

Image-based in-situ process monitoring

In-line monitoring of OLED layer thickness and dopant concentration

Methods and systems to measure properties of products on a moving b...

In-situ, real-time detection of particulate defects in a fluid

Method and apparatus for detection of particle size in a fluid

Image based metrology of surface deformations

Simultaneous multi-directional laser wafer inspection

Method and system for optical three dimensional topography measurement

Spectrum shaping devices and techniques for optical characterizatio...

Imaging reflectometer

High sensitivity image-based reflectometry

High sensitivity image-based reflectometry

Integrated reflectometer or ellipsometer

Radial polarizer for particle detection

Imaging reflectometer

Simultaneous multi-directional laser wafer inspection

Systems and methods for defect material classification

Method and system for optical three dimensional topography measurement

Digital lithography with extended field size

Methods and apparatus for measuring height on a semiconductor wafer

Wafer inspection

Digital lithography with extended depth of focus

Dark-field inspection using a low-noise sensor

Systems and methods for defect material classification

Methods and apparatus for polarized wafer inspection

Generating an array of spots on inclined surfaces

Wafer inspection

TDI sensor in a darkfield system

Image acquisition system, image acquisition method, and inspection...

Patents Applicationslast 30 patents

OBLIQUE UNIFORM ILLUMINATION FOR IMAGING SYSTEMS

GAS FLOW CONFIGURATIONS FOR SEMICONDUCTOR INSPECTIONS

GAS FLOW CONFIGURATIONS FOR SEMICONDUCTOR INSPECTIONS

IN-LINE MONITORING OF OLED LAYER THICKNESS AND DOPANT CONCENTRATION

METHODS AND SYSTEMS TO MEASURE PROPERTIES OF MOVING PRODUCTS IN DEV...

Single-Material Waveplates for Pupil Polarization Filtering

Reflective Waveplates for Pupil Polarization Filtering

METHOD AND APPARATUS FOR DETECTION OF PARTICLE SIZE IN A FLUID

IMAGE-BASED IN-SITU PROCESS MONITORING

IMAGE BASED METROLOGY OF SURFACE DEFORMATIONS

METHODS AND SYSTEMS TO MEASURE PROPERTIES OF PRODUCTS ON A MOVING B...

METHOD AND APPARATUS FOR DETECTION OF PARTICLE SIZE IN A FLUID

IMAGE BASED METROLOGY OF SURFACE DEFORMATIONS

HIGH SENSITIVITY IMAGE-BASED REFLECTOMETRY

HIGH SENSITIVITY IMAGE-BASED REFLECTOMETRY

IN-LINE MONITORING OF OLED LAYER THICKNESS AND DOPANT CONCENTRATION

SPECTRUM SHAPING DEVICES AND TECHNIQUES FOR OPTICAL CHARACTERIZATIO...

IN-SITU, REAL-TIME DETECTION OF PARTICULATE DEFECTS IN A FLUID

INTEGRATED REFLECTOMETER OR ELLIPSOMETER

IMAGING REFLECTOMETER

SIMULTANEOUS MULTI-DIRECTIONAL LASER WAFER INSPECTION

IMAGING REFLECTOMETER

Method and System for Optical Three Dimensional Topography Measurement

Radial Polarizer for Particle Detection

Systems and Methods for Defect Material Classification

METHODS AND APPARATUS FOR POLARIZED WAFER INSPECTION

Method and System for Optical Three Dimensional Topography Measurement

Systems and Methods for Defect Material Classification

Wafer Inspection

SIMULTANEOUS MULTI-DIRECTIONAL LASER WAFER INSPECTION