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Gurtej S. Sandhu
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Boise, ID, US
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Patent Application
Method to reduce fixed charge in CVD ozone deposited films
Publication number
20060029736
Publication date
Feb 9, 2006
Micron Technology, Inc.
Gurtej S. Sandhu
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...