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Guy Eytan
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Menora, IL
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last 30 patents
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Patent Grant
System and method for inspecting charged particle responsive resist
Patent number
7,235,794
Issue date
Jun 26, 2007
Applied Materials, Inc.
Benzion Sender
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
System and method for inspecting charged particle responsive resist
Publication number
20050067582
Publication date
Mar 31, 2005
Benzion Sender
G01 - MEASURING TESTING