Gwang Lae Park

Person

  • Hwaseong-si, KR

Patents Grantslast 30 patents

  • Information Patent Grant

    Atomic layer deposition apparatus

    • Patent number 8,545,940
    • Issue date Oct 1, 2013
    • ASM Genitech Korea Ltd.
    • Seung Woo Choi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Grant

    Atomic layer deposition apparatus

    • Patent number 8,282,735
    • Issue date Oct 9, 2012
    • ASM Genitech Korea Ltd
    • Seung Woo Choi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

  • Information Patent Application

    ATOMIC LAYER DEPOSITION APPARATUS

    • Publication number 20130052348
    • Publication date Feb 28, 2013
    • ASM Genitech Korea Ltd.
    • Seung Woo Choi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
  • Information Patent Application

    ATOMIC LAYER DEPOSITION APPARATUS

    • Publication number 20090136665
    • Publication date May 28, 2009
    • ASM Genitech Korea Ltd.
    • Seung Woo Choi
    • C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...