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Gwang Lae Park
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Hwaseong-si, KR
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last 30 patents
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Patent Grant
Atomic layer deposition apparatus
Patent number
8,545,940
Issue date
Oct 1, 2013
ASM Genitech Korea Ltd.
Seung Woo Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Atomic layer deposition apparatus
Patent number
8,282,735
Issue date
Oct 9, 2012
ASM Genitech Korea Ltd
Seung Woo Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Patents Applications
last 30 patents
Information
Patent Application
ATOMIC LAYER DEPOSITION APPARATUS
Publication number
20130052348
Publication date
Feb 28, 2013
ASM Genitech Korea Ltd.
Seung Woo Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
ATOMIC LAYER DEPOSITION APPARATUS
Publication number
20090136665
Publication date
May 28, 2009
ASM Genitech Korea Ltd.
Seung Woo Choi
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...