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last 30 patents
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Patent Application
SUBSTRATE PROCESSING APPARATUS AND SHUTTER
Publication number
20240128058
Publication date
Apr 18, 2024
TOKYO ELECTRON LIMITED
Takashi ARAMAKI
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE PROCESSING SYSTEM AND TRANSFER METHOD
Publication number
20230215753
Publication date
Jul 6, 2023
TOKYO ELECTRON LIMITED
Norihiko AMIKURA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE SUPPORT, PLASMA PROCESSING APPARATUS, AND RING REPLACEMEN...
Publication number
20230178417
Publication date
Jun 8, 2023
TOKYO ELECTRON LIMITED
Shin MATSUURA
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
PLASMA PROCESSING APPARATUS
Publication number
20220406575
Publication date
Dec 22, 2022
TOKYO ELECTRON LIMITED
Gyeong min PARK
H01 - BASIC ELECTRIC ELEMENTS
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Patent Application
SUBSTRATE SUPPORT AND SUBSTRATE PROCESSING APPARATUS
Publication number
20220122816
Publication date
Apr 21, 2022
TOKYO ELECTRON LIMITED
Nobutaka SASAKI
H01 - BASIC ELECTRIC ELEMENTS