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H. Alexander Anderson
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Santa Cruz, CA, US
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Patents Grants
last 30 patents
Information
Patent Grant
Local store for a wafer processing station
Patent number
6,726,429
Issue date
Apr 27, 2004
Vertical Solutions, Inc.
James G. Sackett
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Linear pad conditioning apparatus
Patent number
6,149,512
Issue date
Nov 21, 2000
Aplex, Inc.
Ethan C. Wilson
B24 - GRINDING POLISHING
Information
Patent Grant
Modular wafer polishing apparatus and method
Patent number
5,957,764
Issue date
Sep 28, 1999
Aplex, Inc.
H. Alexander Anderson
B24 - GRINDING POLISHING
Information
Patent Grant
Wafer shuttle system
Patent number
5,947,802
Issue date
Sep 7, 1999
Aplex, Inc.
John Weiguo Zhang
B24 - GRINDING POLISHING
Information
Patent Grant
Method of processing a substrate in a photolithography system utili...
Patent number
5,935,768
Issue date
Aug 10, 1999
Semiconductor Systems, Inc.
Michael R. Biche
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Clustered photolithography system
Patent number
5,651,823
Issue date
Jul 29, 1997
Semiconductor Systems, Inc.
Michael L. Parodi
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Thermal process module for substrate coat/develop system
Patent number
5,553,994
Issue date
Sep 10, 1996
Semiconductor Systems, Inc.
Michael R. Biche
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Local store for a wafer processing station
Publication number
20030194297
Publication date
Oct 16, 2003
James G. Sackett
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Local store for a wafer processing station
Publication number
20030156928
Publication date
Aug 21, 2003
James G. Sackett
H01 - BASIC ELECTRIC ELEMENTS