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H. Steven Larson
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San Jose, CA, US
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last 30 patents
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Patent Grant
Apparatus and method for cross-flow purge for optical components in...
Patent number
9,662,688
Issue date
May 30, 2017
KLA-Tencor Corporation
Garry Rose
B08 - CLEANING
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Patent Grant
High purity ozone generator for optics cleaning and recovery
Patent number
9,573,111
Issue date
Feb 21, 2017
KLA-Tencor Corporation
Garry A. Rose
B01 - PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
Patents Applications
last 30 patents
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Patent Application
APPARATUS AND METHOD FOR CROSS-FLOW PURGE FOR OPTICAL COMPONENTS IN...
Publication number
20140007910
Publication date
Jan 9, 2014
Garry Rose
B08 - CLEANING