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Ha-Soo Hwang
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Busan, KR
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last 30 patents
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Patent Grant
Etching, cleaning and drying methods using supercritical fluid and...
Patent number
8,790,470
Issue date
Jul 29, 2014
Samsung Electronics Co., Ltd.
Hyo-san Lee
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Etching, cleaning and drying methods using supercritical fluid and...
Patent number
8,585,917
Issue date
Nov 19, 2013
Samsung Electronics Co., Ltd.
Hyo-san Lee
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information
Patent Grant
Etching, cleaning and drying methods using supercritical fluid and...
Patent number
8,084,367
Issue date
Dec 27, 2011
Samsung Electronics Co., Ltd.
Hyo-san Lee
Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC