Hades Lee

Person

  • Tainan, TW

Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    Systems and methods for tool monitoring

    • Publication number 20060293780
    • Publication date Dec 28, 2006
    • Taiwan Semiconductor Manufacturing Co., Ltd.
    • Yung-Cheng Chang
    • G05 - CONTROLLING REGULATING