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Grenoble, FR
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last 30 patents
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Patent Grant
MEMS device for generating an ion beam
Patent number
10,395,907
Issue date
Aug 27, 2019
Commissariat a l'Energie Atomique et Aux Energies Alternatives
Thomas Alava
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
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Patent Application
MEMS DEVICE FOR GENERATING AN ION BEAM
Publication number
20180254175
Publication date
Sep 6, 2018
Commissariat A L'Energie Atomique et Aux Energies Alternatives
Thomas ALAVA
H01 - BASIC ELECTRIC ELEMENTS