Haejoong Park

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Suwon-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for plasma etching
- Patent number 12,211,672
- Issue date Jan 28, 2025
- Samsung Electronics Co., Ltd.
- Jongwoo Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Apparatus and method for plasma etching
- Patent number 11,984,304
- Issue date May 14, 2024
- Samsung Electronics Co., Ltd.
- Jongwoo Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor manufacturing apparatus
- Patent number 11,430,679
- Issue date Aug 30, 2022
- Samsung Electronics Co., Ltd.
- Kwangnam Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck assemblies capable of bidirectional flow of coo...
- Patent number 9,912,258
- Issue date Mar 6, 2018
- Samsung Electronics Co., Ltd.
- Haejoong Park
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Grant
Methods and systems for managing semiconductor manufacturing equipment
- Patent number 9,870,900
- Issue date Jan 16, 2018
- Samsung Electronics Co., Ltd.
- Kye Hyun Baek
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR PLASMA ETCHING
- Publication number 20220328291
- Publication date Oct 13, 2022
- Samsung Electronics Co., Ltd.
- Jongwoo Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR MANUFACTURING APPARATUS
- Publication number 20210035830
- Publication date Feb 4, 2021
- Samsung Electronics Co., Ltd.
- Kwangnam KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK ASSEMBLIES CAPABLE OF BIDIRECTIONAL FLOW OF COO...
- Publication number 20160071755
- Publication date Mar 10, 2016
- Haejoong PARK
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
Methods and Systems for Managing Semiconductor Manufacturing Equipment
- Publication number 20160035545
- Publication date Feb 4, 2016
- Samsung Electronics Co., Ltd.
- Kye Hyun Baek
- H01 - BASIC ELECTRIC ELEMENTS