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Hai JIANG
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Panorama City, CA, US
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last 30 patents
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Patent Grant
Contour-based defect detection using an inspection apparatus
Patent number
8,669,523
Issue date
Mar 11, 2014
KLA-Tencor Corporation
Chien-Huei Chen
G01 - MEASURING TESTING
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last 30 patents
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Patent Application
CONTOUR-BASED DEFECT DETECTION USING AN INSPECTION APPARATUS
Publication number
20120298862
Publication date
Nov 29, 2012
Chien-Huei CHEN
G06 - COMPUTING CALCULATING COUNTING