Hai Won Lee

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Seongnam-si, KR

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Patents Grantslast 30 patents

Information Patent Grant
Fabrication method of extreme ultraviolet radiation mask mirror usi...
- Patent number 7,507,505
- Issue date Mar 24, 2009
- IUFC-HYU (Industry-University Cooperation Foundation Hanyang University)
- Hai Won Lee
- B82 - NANO-TECHNOLOGY