Haibo Huang

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Moorpark, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Chuck heater for improved planar deposition process
- Patent number 6,328,807
- Issue date Dec 11, 2001
- Corning Incorporated
- Heather D. Boek
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
Suspended-wafer chuck
- Publication number 20020179223
- Publication date Dec 5, 2002
- Heather D. Boek
- G02 - OPTICS