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Haico Victor KOK
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Veldhoven, NL
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Patents Grants
last 30 patents
Information
Patent Grant
Metrology method and associated metrology and lithographic apparatuses
Patent number
12,032,299
Issue date
Jul 9, 2024
ASML Netherlands B.V.
Patricius Aloysius Jacobus Tinnemans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sensor, lithographic apparatus, and device manufacturing method
Patent number
11,022,902
Issue date
Jun 1, 2021
ASML Netherlands B.V.
Arie Jeffrey Den Boef
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Measurement method comprising in-situ printing of apparatus mark an...
Patent number
10,481,507
Issue date
Nov 19, 2019
ASML Holding N.V.
Kevin J. Violette
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sensor, lithographic apparatus and device manufacturing method
Patent number
9,971,254
Issue date
May 15, 2018
ASML Netherlands B.V.
Thibault Simon Mathieu Laurent
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic method to apply a pattern to a substrate and lithograp...
Patent number
9,891,532
Issue date
Feb 13, 2018
ASML Netherlands B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sensor system for lithography
Patent number
9,864,282
Issue date
Jan 9, 2018
ASML Netherlands B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sensor, lithographic apparatus and device manufacturing method
Patent number
9,753,382
Issue date
Sep 5, 2017
ASML Netherlands B.V.
Thibault Simon Mathieu Laurent
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sensor system for lithography
Patent number
9,690,207
Issue date
Jun 27, 2017
ASML Netherlands B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic method to apply a pattern to a substrate and lithograp...
Patent number
9,423,688
Issue date
Aug 23, 2016
ASML Netherlands B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sensor and lithographic apparatus
Patent number
9,331,117
Issue date
May 3, 2016
ASML Netherlands B.V.
Stoyan Nihtianov
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and a method for determining a polarization...
Patent number
9,170,498
Issue date
Oct 27, 2015
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and method
Patent number
9,116,446
Issue date
Aug 25, 2015
ASML Netherlands B.V.
Robbert Jan Voogd
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic method to apply a pattern to a substrate and lithograp...
Patent number
8,760,620
Issue date
Jun 24, 2014
ASML Netherlands B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and sensor therefor
Patent number
8,629,418
Issue date
Jan 14, 2014
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus and device manufacturing method
Patent number
8,482,718
Issue date
Jul 9, 2013
ASML Netherlands B.V.
Wilhelmus Maria Corbeij
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic method to apply a pattern to a substrate and lithograp...
Patent number
8,436,977
Issue date
May 7, 2013
ASML Netherlands B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Device manufacturing method and lithographic apparatus
Patent number
8,049,864
Issue date
Nov 1, 2011
ASML Netherlands B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, radiation sensor and method of manufacturin...
Patent number
8,013,977
Issue date
Sep 6, 2011
ASML Netherlands B.V.
Haico Victor Kok
G01 - MEASURING TESTING
Information
Patent Grant
Method and apparatus for vibration detection and vibration analysis...
Patent number
7,773,235
Issue date
Aug 10, 2010
ASML Netherlands B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sensor for use in a lithographic apparatus
Patent number
7,453,078
Issue date
Nov 18, 2008
ASML Netherlands B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apodization measurement for lithographic apparatus
Patent number
7,443,485
Issue date
Oct 28, 2008
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for vibration detection and vibration analysis...
Patent number
7,409,302
Issue date
Aug 5, 2008
ASML Netherlands B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Wave front sensor with grey filter and lithographic apparatus compr...
Patent number
7,388,652
Issue date
Jun 17, 2008
ASML Netherlands B.V.
Arie Johan Van Der Sijs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Apodization measurement for lithographic apparatus
Patent number
7,315,353
Issue date
Jan 1, 2008
ASML Netherlands B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method and apparatus for vibration detection, method and apparatus...
Patent number
7,308,368
Issue date
Dec 11, 2007
ASML Netherlands B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Sensor for use in a lithographic apparatus
Patent number
7,282,701
Issue date
Oct 16, 2007
ASML Netherlands B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Method of determining aberration of a projection system of a lithog...
Patent number
7,242,475
Issue date
Jul 10, 2007
ASML Netherlands B.V.
Johannes Jacobus Matheus Baselmans
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, method of determining properties thereof an...
Patent number
7,187,431
Issue date
Mar 6, 2007
ASML Netherlands B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Grating patch arrangement, lithographic apparatus, method of testin...
Patent number
7,113,255
Issue date
Sep 26, 2006
ASML Holding N.V.
Sherman Poultney
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Grant
Lithographic apparatus, device manufacturing method, and device man...
Patent number
6,888,151
Issue date
May 3, 2005
ASML Netherlands B.V.
Mark Kroon
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
Information
Patent Application
LITHOGRAPHIC APPARATUS, MULTI-WAVELENGTH PHASE-MODULATED SCANNING M...
Publication number
20230213871
Publication date
Jul 6, 2023
ASML NETHERLANDS B.V.
Sebastianus Adrianus GOORDEN
G01 - MEASURING TESTING
Information
Patent Application
METROLOGY METHOD AND ASSOCIATED METROLOGY AND LITHOGRAPHIC APPARATUSES
Publication number
20230017491
Publication date
Jan 19, 2023
ASML NETHERLANDS B.V.
Patricius Aloysius Jacobus TINNEMANS
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Sensor, Lithographic Apparatus, and Device Manufacturing Method
Publication number
20210072647
Publication date
Mar 11, 2021
ASML NETHERLANDS B.V.
Arie Jeffrey DEN BOEF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
MEASUREMENT METHOD COMPRISING IN-SITU PRINTING OF APPARATUS MARK AN...
Publication number
20190196341
Publication date
Jun 27, 2019
ASML Holding N.V.
Kevin J VIOLETTE
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20170363964
Publication date
Dec 21, 2017
ASML NETHERLANDS B.V.
Thibault Simon Mathieu LAURENT
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
SENSOR SYSTEM FOR LITHOGRAPHY
Publication number
20170219937
Publication date
Aug 3, 2017
ASML NETHERLANDS B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Method to Apply a Pattern to a Substrate and Lithograp...
Publication number
20160357115
Publication date
Dec 8, 2016
ASML NETHERLANDS B.V.
Haico Victor KOK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Sensor and Lithographic Apparatus
Publication number
20150294998
Publication date
Oct 15, 2015
ASML NETHERLANDS B.V.
Stoyan Nihtianov
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SENSOR SYSTEM FOR LITHOGRAPHY
Publication number
20150286153
Publication date
Oct 8, 2015
ASML NETHERLANDS B.V.
Haico Victor Kok
G01 - MEASURING TESTING
Information
Patent Application
SENSOR, LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20150077728
Publication date
Mar 19, 2015
ASML NETHERLANDS B.V.
Thibault Simon Mathieu Laurent
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Method to Apply a Pattern to a Substrate and Lithograp...
Publication number
20140293261
Publication date
Oct 2, 2014
ASML NETHERLANDS B.V.
Haico Victor KOK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Method to Apply a Pattern to a Substrate and Lithograp...
Publication number
20130235360
Publication date
Sep 12, 2013
ASML NETHERLANDS B.V.
Haico Victor KOK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and a Method for Determining a Polarization...
Publication number
20130176547
Publication date
Jul 11, 2013
ASML NETHERLANDS B.V.
Marcus Adrianus VAN DE KERKHOF
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic Apparatus and Method
Publication number
20120242967
Publication date
Sep 27, 2012
ASML NETHERLANDS B.V.
Robbert Jan Voogd
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
Publication number
20110043780
Publication date
Feb 24, 2011
ASML NETHERLANDS B.V.
Wilhelmus Maria Corbeij
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Passive reticle tool, a lithographic apparatus and a method of patt...
Publication number
20100182582
Publication date
Jul 22, 2010
ASML NETHERLANDS B.V,
Marcus Adrianus Van De Kerkhof
G01 - MEASURING TESTING
Information
Patent Application
Lithographic projection system and projection lens polarization sensor
Publication number
20100118288
Publication date
May 13, 2010
Marcus Adrianus Van De Kerkhof
G01 - MEASURING TESTING
Information
Patent Application
Lithographic Apparatus, Method for Determining at Least One Polariz...
Publication number
20100045956
Publication date
Feb 25, 2010
ASML NETHERLANDS B.V.
Marcus Adrianus Van De Kerkhof
G01 - MEASURING TESTING
Information
Patent Application
Lithographic Method to Apply a Pattern to a Substrate and Lithograp...
Publication number
20090213351
Publication date
Aug 27, 2009
ASML NETHERLANDS B.V.
Haico Victor KOK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device Manufacturing Method and Lithographic Apparatus
Publication number
20090168039
Publication date
Jul 2, 2009
ASML NETHERLANDS B.V.
Haico Victor KOK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Device for Transmission Image Detection for Use in a Lithographic P...
Publication number
20090153830
Publication date
Jun 18, 2009
ASML NETHERLANDS B.V.
Haico Victor KOK
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for vibration detection and vibration analysis...
Publication number
20090051934
Publication date
Feb 26, 2009
ASML NETHERLANDS B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, radiation sensor and method of manufacturin...
Publication number
20080013059
Publication date
Jan 17, 2008
ASML NETHERLANDS B.V.
Haico Victor Kok
G01 - MEASURING TESTING
Information
Patent Application
Sensor for use in a lithographic apparatus
Publication number
20080007844
Publication date
Jan 10, 2008
ASML NETHERLANDS B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Wave front sensor with grey filter and lithographic apparatus compr...
Publication number
20070291245
Publication date
Dec 20, 2007
ASML NETHERLANDS
Arie Johan Van Der Sijs
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Sensor for use in a lithographic apparatus
Publication number
20070108377
Publication date
May 17, 2007
ASML NETHERLANDS B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus and a method for determining a polarization...
Publication number
20060203221
Publication date
Sep 14, 2006
ASML NETHERLANDS B.V.
Marcus Adrianus Van De Kerkhof
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Sensor for use in a lithographic apparatus
Publication number
20060192093
Publication date
Aug 31, 2006
ASML NETHERLANDS B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Lithographic apparatus, method of determining properties thereof an...
Publication number
20060103826
Publication date
May 18, 2006
ASML NETHERLANDS B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Method and apparatus for vibration detection and vibration analysis...
Publication number
20060061746
Publication date
Mar 23, 2006
ASML NETHERLANDS B.V.
Haico Victor Kok
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY