Haifeng Huang

Person

Livermore, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Correcting aberration and apodization of an optical system using co...
- Patent number 12,092,814
- Issue date Sep 17, 2024
- KLA Corporation
- Haifeng Huang
- G02 - OPTICS
Information Patent Grant
EUV in-situ linearity calibration for TDI image sensors using test...
- Patent number 11,733,605
- Issue date Aug 22, 2023
- KLA Corporation
- Haifeng Huang
- G01 - MEASURING TESTING
Information Patent Grant
Fast phase-shift interferometry by laser frequency shift
- Patent number 11,469,571
- Issue date Oct 11, 2022
- KLA Corporation
- Haifeng Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Common path mode fiber tip diffraction interferometer for wavefront...
- Patent number 11,333,487
- Issue date May 17, 2022
- KLA Corporation
- Haifeng Huang
- G01 - MEASURING TESTING
Information Patent Grant
Methods and apparatus for polarizing reticle inspection
- Patent number 10,168,273
- Issue date Jan 1, 2019
- KLA-Tencor Corporation
- Haifeng Huang
- G01 - MEASURING TESTING

Patents Applicationslast 30 patents

Information Patent Application
RECTANGULAR CUBOID, NON-POLARIZING BEAM SPLITTER THAT AVOIDS INTERF...
- Publication number 20240280828
- Publication date Aug 22, 2024
- KLA Corporation
- Haifeng Huang
- G02 - OPTICS
Information Patent Application
EUV In-Situ Linearity Calibration for TDI Image Sensors Using Test...
- Publication number 20230341760
- Publication date Oct 26, 2023
- KLA Corporation
- Haifeng Huang
- G01 - MEASURING TESTING
Information Patent Application
CORRECTING ABERRATION AND APODIZATION OF AN OPTICAL SYSTEM USING CO...
- Publication number 20220244530
- Publication date Aug 4, 2022
- Haifeng Huang
- G02 - OPTICS
Information Patent Application
FAST PHASE-SHIFT INTERFEROMETRY BY LASER FREQUENCY SHIFT
- Publication number 20210159667
- Publication date May 27, 2021
- KLA Corporation
- Haifeng Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
COMMON PATH MODE FIBER TIP DIFFRACTION INTERFEROMETER FOR WAVEFRONT...
- Publication number 20210123716
- Publication date Apr 29, 2021
- KLA Corporation
- Haifeng Huang
- G01 - MEASURING TESTING
Information Patent Application
EUV In-Situ Linearity Calibration for TDI Image Sensors Using Test...
- Publication number 20200401037
- Publication date Dec 24, 2020
- KLA Corporation
- Haifeng Huang
- G01 - MEASURING TESTING
Information Patent Application
METHODS AND APPARATUS FOR POLARIZING RETICLE INSPECTION
- Publication number 20190003960
- Publication date Jan 3, 2019
- KLA-Tencor Corporation
- Haifeng Huang
- G01 - MEASURING TESTING

Haifeng Huang

Person

Patents Grantslast 30 patents

Correcting aberration and apodization of an optical system using co...

EUV in-situ linearity calibration for TDI image sensors using test...

Fast phase-shift interferometry by laser frequency shift

Common path mode fiber tip diffraction interferometer for wavefront...

Methods and apparatus for polarizing reticle inspection

Patents Applicationslast 30 patents

RECTANGULAR CUBOID, NON-POLARIZING BEAM SPLITTER THAT AVOIDS INTERF...

EUV In-Situ Linearity Calibration for TDI Image Sensors Using Test...

CORRECTING ABERRATION AND APODIZATION OF AN OPTICAL SYSTEM USING CO...

FAST PHASE-SHIFT INTERFEROMETRY BY LASER FREQUENCY SHIFT

COMMON PATH MODE FIBER TIP DIFFRACTION INTERFEROMETER FOR WAVEFRONT...

EUV In-Situ Linearity Calibration for TDI Image Sensors Using Test...

METHODS AND APPARATUS FOR POLARIZING RETICLE INSPECTION