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Haiko Rolff
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Dresden, DE
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Patents Grants
last 30 patents
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Patent Grant
Lithographic mask and method of forming a lithographic mask
Patent number
8,293,431
Issue date
Oct 23, 2012
Advanced Mask Technology Center GmbH & Co. KG
Haiko Rolff
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Patents Applications
last 30 patents
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Patent Application
Lithographic Mask and Method of Forming a Lithographic Mask
Publication number
20100266939
Publication date
Oct 21, 2010
Haiko Rolff
G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information
Patent Application
Mask Blank, Photomask and Method of Manufacturing a Photomask
Publication number
20080318139
Publication date
Dec 25, 2008
Advanced Mask Technology Center GmbH & Co. KG
Uwe Dersch
B82 - NANO-TECHNOLOGY