Haili ZHANG

Follow

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Defect pattern grouping method and system
- Patent number 11,238,579
- Issue date Feb 1, 2022
- ASML Netherlands B.V.
- Wei Fang
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method for determining corrections to features of a mask
- Patent number 11,126,089
- Issue date Sep 21, 2021
- ASML Netherlands B.V.
- Wei Fang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
PROCESSING REFERENCE DATA FOR WAFER INSPECTION
- Publication number 20230139085
- Publication date May 4, 2023
- ASML NETHERLANDS B.V.
- Shengcheng JIN
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD FOR DETERMINING CORRECTIONS TO FEATURES OF A MASK
- Publication number 20200326632
- Publication date Oct 15, 2020
- ASML NETHERLANDS B.V.
- Wei Fang
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEFECT PATTERN GROUPING METHOD AND SYSTEM
- Publication number 20190333205
- Publication date Oct 31, 2019
- ASML Netherlands B.V.
- Wei FANG
- G06 - COMPUTING CALCULATING COUNTING