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Hailiang LU

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  • Shanghai, CN
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Patents Grantslast 30 patents

Patents Applicationslast 30 patents

  • Information Patent Application

    CHIP DEFECT DETECTION DEVICE AND DETECTION METHOD
    • Publication number 20200173932
    • Publication date Jun 4, 2020
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Pengli ZHANG
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Application

    AUTOMATIC OPTICAL INSPECTION DEVICE AND METHOD
    • Publication number 20190293566
    • Publication date Sep 26, 2019
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Hailiang LU
    • G01 - MEASURING TESTING
  • Information Patent Application

    AUTOMATIC OPTICAL INSPECTION METHOD
    • Publication number 20190043182
    • Publication date Feb 7, 2019
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO.,LTD.
    • Fan WANG
    • G06 - COMPUTING CALCULATING COUNTING
  • Information Patent Application

    DEVICE AND METHOD FOR DETECTING OVERLAY ERROR
    • Publication number 20170351184
    • Publication date Dec 7, 2017
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
    • Bofang PENG
    • G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
  • Information Patent Application

    LASER ANNEALING DEVICE
    • Publication number 20170144251
    • Publication date May 25, 2017
    • SHANGHAI MICRO ELECTRONICS EQUIPMENT Co., LTD.
    • Chunfeng SONG
    • B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR