HAITAO WANG

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Methods and apparatus for processing a substrate
- Patent number 11,990,319
- Issue date May 21, 2024
- Applied Materials, Inc.
- Yida Lin
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
High power electrostatic chuck design with radio frequency coupling
- Patent number 11,948,826
- Issue date Apr 2, 2024
- Applied Materials, Inc.
- Jaeyong Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High power electrostatic chuck design with radio frequency coupling
- Patent number 11,532,497
- Issue date Dec 20, 2022
- Applied Materials, Inc.
- Jaeyong Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Methods and apparatus for dechucking wafers
- Patent number 11,171,030
- Issue date Nov 9, 2021
- Applied Materials, Inc.
- Hamid Noorbakhsh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Workpiece carrier for high power with enhanced edge sealing
- Patent number 11,127,619
- Issue date Sep 21, 2021
- Applied Materials, Inc.
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck assembly having a dielectric filler
- Patent number 10,930,540
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate support with electrically floating power supply
- Patent number 10,904,996
- Issue date Jan 26, 2021
- Applied Materials, Inc.
- Travis Lee Koh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Process chamber having tunable showerhead and tunable liner
- Patent number 10,811,233
- Issue date Oct 20, 2020
- Applied Materials, Inc.
- Andrew Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method and apparatus for de-chucking a workpiece using a swing volt...
- Patent number 10,784,132
- Issue date Sep 22, 2020
- Applied Materials, Inc.
- Haitao Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
High power electrostatic chuck with aperture-reducing plug in a gas...
- Patent number 10,770,270
- Issue date Sep 8, 2020
- Applied Materials, Inc.
- Jaeyong Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead with reduced backside plasma ignition
- Patent number 10,745,807
- Issue date Aug 18, 2020
- Applied Materials, Inc.
- Haitao Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Real-time measurement of a surface charge profile of an electrostat...
- Patent number 10,656,194
- Issue date May 19, 2020
- Applied Materials, Inc.
- Haitao Wang
- G01 - MEASURING TESTING
Information Patent Grant
Method, apparatus and system for wafer dechucking using dynamic vol...
- Patent number 10,546,731
- Issue date Jan 28, 2020
- Applied Materials, Inc.
- Haitao Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck assembly having a dielectric filler
- Patent number 10,504,765
- Issue date Dec 10, 2019
- Applied Materials, Inc.
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Systems and methods for electrical and magnetic uniformity and skew...
- Patent number 10,410,889
- Issue date Sep 10, 2019
- Applied Materials, Inc.
- S. M. Reza Sadjadi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for ion energy distribution manipulation for p...
- Patent number 10,395,896
- Issue date Aug 27, 2019
- Applied Materials, Inc.
- Wonseok Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead with reduced backside plasma ignition
- Patent number 10,378,108
- Issue date Aug 13, 2019
- Applied Materials, Inc.
- Haitao Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for de-chucking a workpiece using a swing volt...
- Patent number 10,242,893
- Issue date Mar 26, 2019
- Applied Materials, Inc.
- Haitao Wang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Tunable magnetic field to improve uniformity
- Patent number 9,646,843
- Issue date May 9, 2017
- Applied Materials, Inc.
- Andrew Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
BATCH PROCESSING CHAMBERS FOR PLASMA-ENHANCED DEPOSITION
- Publication number 20240170254
- Publication date May 23, 2024
- Applied Materials, Inc.
- Jianming Fu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE
- Publication number 20230230806
- Publication date Jul 20, 2023
- Yida LIN
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
ION ENERGY CONTROL ON ELECTRODES IN A PLASMA REACTOR
- Publication number 20230170194
- Publication date Jun 1, 2023
- Applied Materials, Inc.
- Yue GUO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH POWER ELECTROSTATIC CHUCK DESIGN WITH RADIO FREQUENCY COUPLING
- Publication number 20230072594
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Jaeyong Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR DECHUCKING WAFERS
- Publication number 20200357675
- Publication date Nov 12, 2020
- Applied Materials, Inc.
- HAMID NOORBAKHSH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK ASSEMBLY HAVING A DIELECTRIC FILLER
- Publication number 20200066566
- Publication date Feb 27, 2020
- Applied Materials, Inc.
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR ION ENERGY DISTRIBUTION MANIPULATION FOR P...
- Publication number 20190348260
- Publication date Nov 14, 2019
- Applied Materials, Inc.
- WONSEOK LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD WITH REDUCED BACKSIDE PLASMA IGNITION
- Publication number 20190271082
- Publication date Sep 5, 2019
- Applied Materials, Inc.
- Haitao WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHOD AND APPARATUS FOR DE-CHUCKING A WORKPIECE USING A SWING VOLT...
- Publication number 20190189481
- Publication date Jun 20, 2019
- Applied Materials, Inc.
- Haitao Wang
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Application
SUBSTRATE SUPPORT WITH ELECTRICALLY FLOATING POWER SUPPLY
- Publication number 20190090338
- Publication date Mar 21, 2019
- Applied Materials, Inc.
- Travis Lee KOH
- H02 - GENERATION CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
Information Patent Application
METHOD AND APPARATUS FOR DE-CHUCKING A WORKPIECE USING A SWING VOLT...
- Publication number 20180366359
- Publication date Dec 20, 2018
- Applied Materials, Inc.
- Haitao Wang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO MODULATE THE WAFER EDGE SHEATH IN A PLASMA PROCESSING CHA...
- Publication number 20180323042
- Publication date Nov 8, 2018
- Applied Materials, Inc.
- Haitao WANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Electrostatic Chuck Assembly Having A Dielectric Filler
- Publication number 20180308736
- Publication date Oct 25, 2018
- Applied Materials, Inc.
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD AND APPARATUS FOR ION ENERGY DISTRIBUTION MANIPULATION FOR P...
- Publication number 20180254171
- Publication date Sep 6, 2018
- WONSEOK LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESS CHAMBER HAVING TUNABLE SHOWERHEAD AND TUNABLE LINER
- Publication number 20180047544
- Publication date Feb 15, 2018
- ANDREW NGUYEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WORKPIECE CARRIER FOR HIGH POWER WITH ENHANCED EDGE SEALING
- Publication number 20170352566
- Publication date Dec 7, 2017
- Applied Materials, Inc.
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH POWER ELECTROSTATIC CHUCK DESIGN WITH RADIO FREQUENCY COUPLING
- Publication number 20170352567
- Publication date Dec 7, 2017
- Applied Materials, Inc.
- Jaeyong Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
WORKPIECE CARRIER WITH GAS PRESSURE IN INNER CAVITIES
- Publication number 20170352565
- Publication date Dec 7, 2017
- Chunlei Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HIGH POWER ELECTROSTATIC CHUCK WITH APERTURE-REDUCING PLUG IN A GAS...
- Publication number 20170352568
- Publication date Dec 7, 2017
- Jaeyong Cho
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD WITH REDUCED BACKSIDE PLASMA IGNITION
- Publication number 20170101713
- Publication date Apr 13, 2017
- Applied Materials, Inc.
- Haitao WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
TUNABLE MAGNETIC FIELD TO IMPROVE UNIFORMITY
- Publication number 20160163511
- Publication date Jun 9, 2016
- Applied Materials, Inc.
- Andrew NGUYEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REAL-TIME MEASUREMENT OF A SURFACE CHARGE PROFILE OF AN ELECTROSTAT...
- Publication number 20160116518
- Publication date Apr 28, 2016
- Applied Materials, Inc.
- HAITAO WANG
- G01 - MEASURING TESTING
Information Patent Application
SYSTEMS AND METHODS FOR ELECTRICAL AND MAGNETIC UNIFORMITY AND SKEW...
- Publication number 20160027667
- Publication date Jan 28, 2016
- Applied Materials, Inc.
- S. M. REZA SADJADI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

HAITAO WANG

Person

Patents Grantslast 30 patents

Methods and apparatus for processing a substrate

High power electrostatic chuck design with radio frequency coupling

High power electrostatic chuck design with radio frequency coupling

Methods and apparatus for dechucking wafers

Workpiece carrier for high power with enhanced edge sealing

Electrostatic chuck assembly having a dielectric filler

Substrate support with electrically floating power supply

Process chamber having tunable showerhead and tunable liner

Method and apparatus for de-chucking a workpiece using a swing volt...

High power electrostatic chuck with aperture-reducing plug in a gas...

Showerhead with reduced backside plasma ignition

Real-time measurement of a surface charge profile of an electrostat...

Method, apparatus and system for wafer dechucking using dynamic vol...

Electrostatic chuck assembly having a dielectric filler

Systems and methods for electrical and magnetic uniformity and skew...

Method and apparatus for ion energy distribution manipulation for p...

Showerhead with reduced backside plasma ignition

Method and apparatus for de-chucking a workpiece using a swing volt...

Tunable magnetic field to improve uniformity

Patents Applicationslast 30 patents

BATCH PROCESSING CHAMBERS FOR PLASMA-ENHANCED DEPOSITION

METHODS AND APPARATUS FOR PROCESSING A SUBSTRATE

ION ENERGY CONTROL ON ELECTRODES IN A PLASMA REACTOR

HIGH POWER ELECTROSTATIC CHUCK DESIGN WITH RADIO FREQUENCY COUPLING

METHODS AND APPARATUS FOR DECHUCKING WAFERS

ELECTROSTATIC CHUCK ASSEMBLY HAVING A DIELECTRIC FILLER

METHOD AND APPARATUS FOR ION ENERGY DISTRIBUTION MANIPULATION FOR P...

SHOWERHEAD WITH REDUCED BACKSIDE PLASMA IGNITION

METHOD AND APPARATUS FOR DE-CHUCKING A WORKPIECE USING A SWING VOLT...

SUBSTRATE SUPPORT WITH ELECTRICALLY FLOATING POWER SUPPLY

METHOD AND APPARATUS FOR DE-CHUCKING A WORKPIECE USING A SWING VOLT...

METHOD TO MODULATE THE WAFER EDGE SHEATH IN A PLASMA PROCESSING CHA...

Electrostatic Chuck Assembly Having A Dielectric Filler

METHOD AND APPARATUS FOR ION ENERGY DISTRIBUTION MANIPULATION FOR P...

PROCESS CHAMBER HAVING TUNABLE SHOWERHEAD AND TUNABLE LINER

WORKPIECE CARRIER FOR HIGH POWER WITH ENHANCED EDGE SEALING

HIGH POWER ELECTROSTATIC CHUCK DESIGN WITH RADIO FREQUENCY COUPLING

WORKPIECE CARRIER WITH GAS PRESSURE IN INNER CAVITIES

HIGH POWER ELECTROSTATIC CHUCK WITH APERTURE-REDUCING PLUG IN A GAS...

SHOWERHEAD WITH REDUCED BACKSIDE PLASMA IGNITION

TUNABLE MAGNETIC FIELD TO IMPROVE UNIFORMITY

REAL-TIME MEASUREMENT OF A SURFACE CHARGE PROFILE OF AN ELECTROSTAT...

SYSTEMS AND METHODS FOR ELECTRICAL AND MAGNETIC UNIFORMITY AND SKEW...