Haiyang Xu

Person

Tokyo, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Cleaning liquid supply device, cleaning unit, and storage medium st...
- Patent number 12,042,901
- Issue date Jul 23, 2024
- Ebara Corporation
- Haiyang Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus and method for removing substrate fr...
- Patent number 12,020,976
- Issue date Jun 25, 2024
- Ebara Corporation
- Haiyang Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate cleaning device and substrate cleaning method
- Patent number 12,002,688
- Issue date Jun 4, 2024
- Ebara Corporation
- Haiyang Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning device and substrate cleaning method
- Patent number 11,996,303
- Issue date May 28, 2024
- Ebara Corporation
- Haiyang Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,541,502
- Issue date Jan 3, 2023
- Ebara Corporation
- Kuniaki Yamaguchi
- B24 - GRINDING POLISHING
Information Patent Grant
Cleaning device, substrate processing apparatus, maintenance method...
- Patent number 11,380,561
- Issue date Jul 5, 2022
- Ebara Corporation
- Hidetatsu Isokawa
- B08 - CLEANING
Information Patent Grant
Cleaning liquid supply device, cleaning unit, and storage medium st...
- Patent number 11,358,253
- Issue date Jun 14, 2022
- Ebara Corporation
- Haiyang Xu
- B24 - GRINDING POLISHING
Information Patent Grant
Substrate processing apparatus
- Patent number 11,173,523
- Issue date Nov 16, 2021
- Ebara Corporation
- Hidetatsu Isokawa
- B08 - CLEANING
Information Patent Grant
Substrate cleaning device and substrate cleaning method
- Patent number 11,164,757
- Issue date Nov 2, 2021
- Ebara Corporation
- Haiyang Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate processing apparatus and method for removing substrate fr...
- Patent number 10,991,615
- Issue date Apr 27, 2021
- Ebara Corporation
- Haiyang Xu
- B08 - CLEANING
Information Patent Grant
Substrate transport system, substrate processing apparatus, hand po...
- Patent number 10,818,531
- Issue date Oct 27, 2020
- Ebara Corporation
- Kuniaki Yamaguchi
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Grant
Cleaning apparatus and substrate processing apparatus
- Patent number 10,438,817
- Issue date Oct 8, 2019
- Ebara Corporation
- Haiyang Xu
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20230326770
- Publication date Oct 12, 2023
- EBARA CORPORATION
- Haiyang Xu
- B08 - CLEANING
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20230307259
- Publication date Sep 28, 2023
- EBARA CORPORATION
- Haiyang Xu
- B08 - CLEANING
Information Patent Application
CLEANING LIQUID SUPPLY DEVICE, CLEANING UNIT, AND STORAGE MEDIUM ST...
- Publication number 20220266417
- Publication date Aug 25, 2022
- EBARA CORPORATION
- Haiyang Xu
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20220020610
- Publication date Jan 20, 2022
- EBARA CORPORATION
- Haiyang Xu
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20210394332
- Publication date Dec 23, 2021
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR REMOVING SUBSTRATE FR...
- Publication number 20210210374
- Publication date Jul 8, 2021
- EBARA CORPORATION
- Haiyang XU
- B08 - CLEANING
Information Patent Application
CLEANING DEVICE, SUBSTRATE PROCESSING APPARATUS, MAINTENANCE METHOD...
- Publication number 20210175099
- Publication date Jun 10, 2021
- EBARA CORPORATION
- Hidetatsu Isokawa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING DEVICE
- Publication number 20200388510
- Publication date Dec 10, 2020
- Koji MAEDA
- B24 - GRINDING POLISHING
Information Patent Application
SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD
- Publication number 20200013640
- Publication date Jan 9, 2020
- EBARA CORPORATION
- Haiyang Xu
- B08 - CLEANING
Information Patent Application
SUBSTRATE PROCESSING APPARATUS
- Publication number 20190355594
- Publication date Nov 21, 2019
- EBARA CORPORATION
- Hidetatsu ISOKAWA
- B08 - CLEANING
Information Patent Application
CLEANING LIQUID SUPPLY DEVICE, CLEANING UNIT, AND STORAGE MEDIUM ST...
- Publication number 20190314951
- Publication date Oct 17, 2019
- EBARA CORPORATION
- Haiyang Xu
- B08 - CLEANING
Information Patent Application
SUBSTRATE TRANSPORT SYSTEM, SUBSTRATE PROCESSING APPARATUS, HAND PO...
- Publication number 20190164796
- Publication date May 30, 2019
- EBARA CORPORATION
- Kuniaki YAMAGUCHI
- B25 - HAND TOOLS PORTABLE POWER-DRIVEN TOOLS MANIPULATORS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND METHOD FOR REMOVING SUBSTRATE FR...
- Publication number 20190057894
- Publication date Feb 21, 2019
- EBARA CORPORATION
- Haiyang XU
- B24 - GRINDING POLISHING
Information Patent Application
CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS
- Publication number 20170207106
- Publication date Jul 20, 2017
- EBARA CORPORATION
- Haiyang Xu
- B08 - CLEANING

Person

Patents Grantslast 30 patents

Cleaning liquid supply device, cleaning unit, and storage medium st...

Substrate processing apparatus and method for removing substrate fr...

Substrate cleaning device and substrate cleaning method

Substrate cleaning device and substrate cleaning method

Substrate processing apparatus

Cleaning device, substrate processing apparatus, maintenance method...

Cleaning liquid supply device, cleaning unit, and storage medium st...

Substrate processing apparatus

Substrate cleaning device and substrate cleaning method

Substrate processing apparatus and method for removing substrate fr...

Substrate transport system, substrate processing apparatus, hand po...

Cleaning apparatus and substrate processing apparatus

Patents Applicationslast 30 patents

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

CLEANING LIQUID SUPPLY DEVICE, CLEANING UNIT, AND STORAGE MEDIUM ST...

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

SUBSTRATE PROCESSING APPARATUS

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR REMOVING SUBSTRATE FR...

CLEANING DEVICE, SUBSTRATE PROCESSING APPARATUS, MAINTENANCE METHOD...

SUBSTRATE PROCESSING DEVICE

SUBSTRATE CLEANING DEVICE AND SUBSTRATE CLEANING METHOD

SUBSTRATE PROCESSING APPARATUS

CLEANING LIQUID SUPPLY DEVICE, CLEANING UNIT, AND STORAGE MEDIUM ST...

SUBSTRATE TRANSPORT SYSTEM, SUBSTRATE PROCESSING APPARATUS, HAND PO...

SUBSTRATE PROCESSING APPARATUS AND METHOD FOR REMOVING SUBSTRATE FR...

CLEANING APPARATUS AND SUBSTRATE PROCESSING APPARATUS