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Hajime Koyanagi
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Koshigaya-shi, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Scanning electron microscope and calibration of image distortion
Patent number
7,750,296
Issue date
Jul 6, 2010
Hitachi High-Technologies Corporation
Keiichiro Hitomi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Charged particle beam measurement equipment, size correction and st...
Patent number
7,683,313
Issue date
Mar 23, 2010
Hitachi High-Technologies Corporation
Yasunari Sohda
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Standard reference component for calibration, fabrication method fo...
Patent number
7,612,334
Issue date
Nov 3, 2009
Hitachi High-Technologies Corporation
Yoshinori Nakayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Recording medium and recording device
Patent number
6,370,107
Issue date
Apr 9, 2002
Hitachi, Ltd.
Sumio Hosaka
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Device using sensor for small rotation angle
Patent number
6,246,652
Issue date
Jun 12, 2001
Hitachi, Ltd.
Atsushi Kikukawa
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Tracking method and recording means thereby
Patent number
5,808,977
Issue date
Sep 15, 1998
Hitachi, Ltd.
Hajime Koyanagi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Precision machining method precision machining apparatus and data s...
Patent number
5,627,815
Issue date
May 6, 1997
Hitachi, Ltd.
Hajime Koyanagi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Precision machining method, precision machining apparatus and data...
Patent number
5,471,064
Issue date
Nov 28, 1995
Hitachi, Ltd.
Hajime Koyanagi
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Scanning probe microscope and method of control error correction
Patent number
5,467,642
Issue date
Nov 21, 1995
Hitachi, Ltd.
Sumio Hosaka
B82 - NANO-TECHNOLOGY
Information
Patent Grant
Surface observing apparatus and method
Patent number
5,436,448
Issue date
Jul 25, 1995
Hitachi, Ltd.
Sumio Hosaka
B82 - NANO-TECHNOLOGY
Patents Applications
last 30 patents
Information
Patent Application
Scanning Electron Microscope and Calibration of Image Distortion
Publication number
20080210867
Publication date
Sep 4, 2008
Keiichiro Hitomi
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Charged particle beam measurement equipment, size correction and st...
Publication number
20080203285
Publication date
Aug 28, 2008
Hitachi High-Technologies Corporation
Yasunari Sohda
B82 - NANO-TECHNOLOGY
Information
Patent Application
STANDARD REFERENCE COMPONENT FOR CALIBRATION, FABRICATION METHOD FO...
Publication number
20080121791
Publication date
May 29, 2008
Yoshinori Nakayama
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Recording medium and recording device
Publication number
20010040864
Publication date
Nov 15, 2001
Hitachi, Ltd.
Sumio Hosaka
B82 - NANO-TECHNOLOGY