TREA

Hajime NAITO

Follow

Person

  • Yamanashi, JP
People

Patents Grantslast 30 patents

  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 11,328,904
    • Issue date May 10, 2022
    • Tokyo Electron Limited
    • Shigeki Doba
    • H01 - BASIC ELECTRIC ELEMENTS
  • Information Patent Grant

    Substrate processing apparatus
    • Patent number 10,734,201
    • Issue date Aug 4, 2020
    • Tokyo Electron Limited
    • Shigeki Doba
    • H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents