Hajime Onoda

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Kawasaki-Shi, JP

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for cleaning semiconductor substrate
- Patent number 9,761,466
- Issue date Sep 12, 2017
- TOSHIBA MEMORY CORPORATION
- Yoshihiro Ogawa
- B08 - CLEANING
Information Patent Grant
Apparatus and method for cleaning semiconductor substrate
- Patent number 8,758,521
- Issue date Jun 24, 2014
- Kabushiki Kaisha Toshiba
- Yoshihiro Ogawa
- B08 - CLEANING
Information Patent Grant
Substrate cleaning apparatus and substrate cleaning method
- Patent number 8,066,020
- Issue date Nov 29, 2011
- Kabushiki Kaisha Toshiba
- Hiroshi Tomita
- B08 - CLEANING

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS AND METHOD FOR CLEANING SEMICONDUCTOR SUBSTRATE
- Publication number 20140238452
- Publication date Aug 28, 2014
- KABUSHIKI KAISHA TOSHIBA
- Yoshihiro OGAWA
- C11 - ANIMAL AND VEGETABLE OILS, FATS, FATTY SUBSTANCES AND WAXES FATTY ACIDS...
Information Patent Application
SUBSTRATE CLEANING APPARATUS AND SUBSTRATE CLEANING METHOD
- Publication number 20120031441
- Publication date Feb 9, 2012
- Kabushiki Kaisha Toshiba
- Hiroshi Tomita
- B08 - CLEANING
Information Patent Application
APPARATUS AND METHOD FOR CLEANING SEMICONDUCTOR SUBSTRATE
- Publication number 20110067734
- Publication date Mar 24, 2011
- Kabushiki Kaisha Toshiba
- Yoshihiro OGAWA
- B08 - CLEANING
Information Patent Application
Semiconductor manufacturing apparatus for use in process of cleanin...
- Publication number 20080006295
- Publication date Jan 10, 2008
- Kunihiro Miyazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Substrate cleaning apparatus and substrate cleaning method
- Publication number 20070095363
- Publication date May 3, 2007
- Hiroshi Tomita
- B08 - CLEANING