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Hajime Onoda
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Tokyo, JP
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last 30 patents
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Patent Grant
Drying apparatus and drying method
Patent number
6,412,501
Issue date
Jul 2, 2002
Kimmon Quartz Co., Ltd.
Hajime Onoda
H01 - BASIC ELECTRIC ELEMENTS
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Patent Grant
Substrate drying apparatus
Patent number
5,657,553
Issue date
Aug 19, 1997
Sharp Kabushiki Kaisha
Tetsuya Tarui
F26 - DRYING