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Ionization sputtering apparatus
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Patent number 6,361,667
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Issue date Mar 26, 2002
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Anelva Corporation
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Masahiko Kobayashi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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Sputtering apparatus
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Patent number 5,944,968
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Issue date Aug 31, 1999
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Anelva Corporation
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Masahiko Kobayashi
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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CVD apparatus
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Patent number 5,676,758
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Issue date Oct 14, 1997
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Anelva Corporation
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Shinya Hasegawa
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
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CVD apparatus
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Patent number 5,624,499
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Issue date Apr 29, 1997
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Anelva Corporation
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Shigeru Mizuno
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C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...