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Hajime Shirakawa
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Horikawa-dori, JP
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Patents Grants
last 30 patents
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Patent Grant
Treating tank, and substrate treating apparatus having the treating...
Patent number
6,199,568
Issue date
Mar 13, 2001
Dainippon Screen Mfg. Co., Ltd.
Kenichiro Arai
B08 - CLEANING
Patents Applications
last 30 patents
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Patent Application
Substrate treating method and apparatus
Publication number
20060043073
Publication date
Mar 2, 2006
Dainippon Screen Mfg. Co., Ltd.
Hajime Shirakawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Substrate treating method and apparatus
Publication number
20040242004
Publication date
Dec 2, 2004
Dainippon Screen Mfg. Co., Ltd.
Hajime Shirakawa
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...