Hakaru MIZOGUCHI

Person

Oyama-shi, JP

People

Patents Grantslast 30 patents

Information Patent Grant
Laser unit
- Patent number 10,447,001
- Issue date Oct 15, 2019
- Gigaphoton Inc.
- Minoru Taniyama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 10,306,743
- Issue date May 28, 2019
- Gigaphoton Inc.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 10,251,255
- Issue date Apr 2, 2019
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 10,117,317
- Issue date Oct 30, 2018
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser unit and extreme ultraviolet light generating system
- Patent number 9,954,339
- Issue date Apr 24, 2018
- Gigaphoton Inc.
- Takashi Suganuma
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 9,877,378
- Issue date Jan 23, 2018
- Gigaphoton Inc.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Two-beam interference apparatus and two-beam interference exposure...
- Patent number 9,507,248
- Issue date Nov 29, 2016
- Gigaphoton Inc.
- Shinji Okazaki
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light generating apparatus, method of generatin...
- Patent number 9,510,434
- Issue date Nov 29, 2016
- Gigaphoton Inc.
- Hakaru Mizoguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 9,497,842
- Issue date Nov 15, 2016
- Gigaphoton Inc.
- Tsukasa Hori
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning method for EUV light generation apparatus
- Patent number 9,465,307
- Issue date Oct 11, 2016
- Gigaphoton Inc.
- Hakaru Mizoguchi
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Extreme ultraviolet light generation system
- Patent number 9,402,297
- Issue date Jul 26, 2016
- Gigaphoton Inc.
- Osamu Wakabayashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser chamber and discharge excitation gas laser apparatus
- Patent number 9,373,926
- Issue date Jun 21, 2016
- Gigaphoton Inc.
- Hiroaki Tsushima
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Optical device, laser apparatus, and extreme ultraviolet light gene...
- Patent number 9,362,703
- Issue date Jun 7, 2016
- Gigaphoton Inc.
- Hakaru Mizoguchi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Laser apparatus
- Patent number 9,331,450
- Issue date May 3, 2016
- Gigaphoton Inc.
- Takeshi Asayama
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
System and method for generating extreme ultraviolet light
- Patent number 9,265,136
- Issue date Feb 16, 2016
- Gigaphoton Inc.
- Tsukasa Hori
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light generation system utilizing a pre-pulse t...
- Patent number 9,072,153
- Issue date Jun 30, 2015
- Gigaphoton Inc.
- Osamu Wakabayashi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Optical device, laser apparatus, and extreme ultraviolet light gene...
- Patent number 8,891,161
- Issue date Nov 18, 2014
- Gigaphoton Inc.
- Hakaru Mizoguchi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chamber replacing method
- Patent number 8,813,329
- Issue date Aug 26, 2014
- Gigaphoton Inc.
- Junichi Fujimoto
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Target supply unit and extreme ultraviolet light generation apparatus
- Patent number 8,809,819
- Issue date Aug 19, 2014
- Gigaphoton Inc.
- Takayuki Yabu
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply apparatus, chamber, and extreme ultraviolet light gen...
- Patent number 8,785,895
- Issue date Jul 22, 2014
- Gigaphoton Inc.
- Hiroshi Umeda
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply unit
- Patent number 8,779,401
- Issue date Jul 15, 2014
- Gigaphoton Inc.
- Hakaru Mizoguchi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Target supply unit
- Patent number 8,742,378
- Issue date Jun 3, 2014
- Gigaphoton Inc.
- Hidenobu Kameda
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Droplet generation and detection device, and droplet control device
- Patent number 8,710,473
- Issue date Apr 29, 2014
- Gigaphoton Inc.
- Hakaru Mizoguchi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source device, laser light source device...
- Patent number 8,698,114
- Issue date Apr 15, 2014
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source apparatus
- Patent number 8,507,883
- Issue date Aug 13, 2013
- Gigaphoton Inc.
- Akira Endo
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method of adjusting a laser light source for an EUV s...
- Patent number 8,395,133
- Issue date Mar 12, 2013
- Gigaphoton Inc.
- Masato Moriya
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultra violet light source apparatus
- Patent number 8,212,228
- Issue date Jul 3, 2012
- Komatsu Ltd.
- Tamotsu Abe
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Chamber replacing method
- Patent number 7,984,539
- Issue date Jul 26, 2011
- Gigaphoton Inc.
- Junichi Fujimoto
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Light source device and exposure equipment using the same
- Patent number 7,078,717
- Issue date Jul 18, 2006
- Gigaphoton Inc.
- Hakaru Mizoguchi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Extreme ultraviolet light source
- Patent number 7,067,832
- Issue date Jun 27, 2006
- Gigaphoton, Inc.
- Hakaru Mizoguchi
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
HIGH-VOLTAGE PULSE GENERATOR AND GAS LASER APPARATUS
- Publication number 20190252846
- Publication date Aug 15, 2019
- National University Corporation Nagaoka University of Technology
- Weihua JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20190141826
- Publication date May 9, 2019
- GIGAPHOTON INC.
- Tsukasa HORI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20190037677
- Publication date Jan 31, 2019
- GIGAPHOTON INC.
- Tsukasa HORI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER UNIT
- Publication number 20180123308
- Publication date May 3, 2018
- Gigaphoton Inc.
- Minoru TANIYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20180110116
- Publication date Apr 19, 2018
- GIGAPHOTON INC.
- Tsukasa HORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SPHEROIDAL MIRROR REFLECTIVITY MEASURING APPARATUS FOR EXTREME ULTR...
- Publication number 20170336282
- Publication date Nov 23, 2017
- THE UNIVERSITY OF TOKYO
- Yohei KOBAYASHI
- G01 - MEASURING TESTING
Information Patent Application
HIGH-VOLTAGE PULSE GENERATOR AND GAS LASER APPARATUS
- Publication number 20170338618
- Publication date Nov 23, 2017
- National University Corporation Nagaoka University of Technology
- Weihua JIANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET GENERATION DEVICE, AND METHOD FOR MANUFACTURING FILTER STRUC...
- Publication number 20170203238
- Publication date Jul 20, 2017
- Gigaphoton Inc.
- Takanobu ISHIHARA
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20170019983
- Publication date Jan 19, 2017
- GIGAPHOTON INC.
- Tsukasa HORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM
- Publication number 20160172814
- Publication date Jun 16, 2016
- Gigaphoton Inc.
- Takashi SUGANUMA
- G02 - OPTICS
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20160128172
- Publication date May 5, 2016
- Gigaphoton Inc.
- Tsukasa HORI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS, METHOD OF GENERATIN...
- Publication number 20150351211
- Publication date Dec 3, 2015
- Gigaphoton Inc.
- Hakaru MIZOGUCHI
- G21 - NUCLEAR PHYSICS NUCLEAR ENGINEERING
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20150264793
- Publication date Sep 17, 2015
- GIGAPHOTON INC.
- Osamu WAKABAYASHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER CHAMBER AND DISCHARGE EXCITATION GAS LASER APPARATUS
- Publication number 20150249312
- Publication date Sep 3, 2015
- GIGAPHOTON INC.
- Hiroaki TSUSHIMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD
- Publication number 20150246848
- Publication date Sep 3, 2015
- GIGAPHOTON INC.
- Hiroshi Ikenoue
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER APPARATUS
- Publication number 20150194781
- Publication date Jul 9, 2015
- GIGAPHOTON INC.
- Takeshi ASAYAMA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM
- Publication number 20150102239
- Publication date Apr 16, 2015
- Gigaphoton Inc.
- Tatsuya YANAGIDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
LASER APPARATUS
- Publication number 20150028231
- Publication date Jan 29, 2015
- GIGAPHOTON INC.
- Hakaru MIZOGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OPTICAL DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENE...
- Publication number 20140374605
- Publication date Dec 25, 2014
- Hakaru MIZOGUCHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LASER APPARATUS
- Publication number 20140328364
- Publication date Nov 6, 2014
- Junichi Fujimoto
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET SUPPLY APPARATUS, CHAMBER, AND EXTREME ULTRAVIOLET LIGHT GEN...
- Publication number 20140008552
- Publication date Jan 9, 2014
- Hiroshi UMEDA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
CLEANING METHOD FOR EUV LIGHT GENERATION APPARATUS
- Publication number 20130319466
- Publication date Dec 5, 2013
- Hakaru MIZOGUCHI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
TARGET SUPPLY DEVICE
- Publication number 20130228709
- Publication date Sep 5, 2013
- GIGAPHOTON INC.
- Hiroshi UMEDA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
DEVICE FOR COLLECTING EXTREME ULTRAVIOLET LIGHT
- Publication number 20130228695
- Publication date Sep 5, 2013
- GIGAPHOTON INC.
- Hakaru MIZOGUCHI
- G02 - OPTICS
Information Patent Application
OPTICAL DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENE...
- Publication number 20130208742
- Publication date Aug 15, 2013
- GIGAPHOTON INC.
- Hakaru Mizoguchi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE, LASER LIGHT SOURCE DEVICE...
- Publication number 20130148677
- Publication date Jun 13, 2013
- GIGAPHOTON INC.
- Masato Moriya
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TWO-BEAM INTERFERENCE APPARATUS AND TWO-BEAM INTERFERENCE EXPOSURE...
- Publication number 20130135601
- Publication date May 30, 2013
- Gigaphoton Inc.
- Shinji OKAZAKI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OPTICAL DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENE...
- Publication number 20130126751
- Publication date May 23, 2013
- GIGAPHOTON INC.
- Hakaru Mizoguchi
- G02 - OPTICS
Information Patent Application
TARGET SUPPLY UNIT
- Publication number 20130048878
- Publication date Feb 28, 2013
- GIGAPHOTON INC.
- Hakaru MIZOGUCHI
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT
- Publication number 20120307851
- Publication date Dec 6, 2012
- Tsukasa HORI
- H01 - BASIC ELECTRIC ELEMENTS

Hakaru MIZOGUCHI

Person

Patents Grantslast 30 patents

Laser unit

System and method for generating extreme ultraviolet light

System and method for generating extreme ultraviolet light

System and method for generating extreme ultraviolet light

Laser unit and extreme ultraviolet light generating system

System and method for generating extreme ultraviolet light

Two-beam interference apparatus and two-beam interference exposure...

Extreme ultraviolet light generating apparatus, method of generatin...

System and method for generating extreme ultraviolet light

Cleaning method for EUV light generation apparatus

Extreme ultraviolet light generation system

Laser chamber and discharge excitation gas laser apparatus

Optical device, laser apparatus, and extreme ultraviolet light gene...

Laser apparatus

System and method for generating extreme ultraviolet light

Extreme ultraviolet light generation system utilizing a pre-pulse t...

Optical device, laser apparatus, and extreme ultraviolet light gene...

Chamber replacing method

Target supply unit and extreme ultraviolet light generation apparatus

Target supply apparatus, chamber, and extreme ultraviolet light gen...

Target supply unit

Target supply unit

Droplet generation and detection device, and droplet control device

Extreme ultraviolet light source device, laser light source device...

Extreme ultraviolet light source apparatus

Apparatus and method of adjusting a laser light source for an EUV s...

Extreme ultra violet light source apparatus

Chamber replacing method

Light source device and exposure equipment using the same

Extreme ultraviolet light source

Patents Applicationslast 30 patents

HIGH-VOLTAGE PULSE GENERATOR AND GAS LASER APPARATUS

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

LASER UNIT

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

SPHEROIDAL MIRROR REFLECTIVITY MEASURING APPARATUS FOR EXTREME ULTR...

HIGH-VOLTAGE PULSE GENERATOR AND GAS LASER APPARATUS

TARGET GENERATION DEVICE, AND METHOD FOR MANUFACTURING FILTER STRUC...

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

LASER UNIT AND EXTREME ULTRAVIOLET LIGHT GENERATING SYSTEM

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT

EXTREME ULTRAVIOLET LIGHT GENERATING APPARATUS, METHOD OF GENERATIN...

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

LASER CHAMBER AND DISCHARGE EXCITATION GAS LASER APPARATUS

LASER PROCESSING APPARATUS AND LASER PROCESSING METHOD

LASER APPARATUS

EXTREME ULTRAVIOLET LIGHT GENERATION SYSTEM

LASER APPARATUS

OPTICAL DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENE...

LASER APPARATUS

TARGET SUPPLY APPARATUS, CHAMBER, AND EXTREME ULTRAVIOLET LIGHT GEN...

CLEANING METHOD FOR EUV LIGHT GENERATION APPARATUS

TARGET SUPPLY DEVICE

DEVICE FOR COLLECTING EXTREME ULTRAVIOLET LIGHT

OPTICAL DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENE...

EXTREME ULTRAVIOLET LIGHT SOURCE DEVICE, LASER LIGHT SOURCE DEVICE...

TWO-BEAM INTERFERENCE APPARATUS AND TWO-BEAM INTERFERENCE EXPOSURE...

OPTICAL DEVICE, LASER APPARATUS, AND EXTREME ULTRAVIOLET LIGHT GENE...

TARGET SUPPLY UNIT

SYSTEM AND METHOD FOR GENERATING EXTREME ULTRAVIOLET LIGHT