Hakki Ergun Cekli

Person

Eindhoven, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Device manufacturing methods
- Patent number 12,078,935
- Issue date Sep 3, 2024
- ASML Netherlands B.V.
- Rizvi Rahman
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method for determining root cause affecting yield in a semiconducto...
- Patent number 11,803,127
- Issue date Oct 31, 2023
- ASML Netherlands B.V.
- Chenxi Lin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Device manufacturing methods
- Patent number 11,442,366
- Issue date Sep 13, 2022
- ASML Netherlands B.V.
- Rizvi Rahman
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of determining a position of a feature
- Patent number 11,392,044
- Issue date Jul 19, 2022
- ASML Netherlands B.V.
- Ralph Timotheus Huijgen
- G01 - MEASURING TESTING
Information Patent Grant
Patterning device cooling system and method of thermally conditioni...
- Patent number 11,036,148
- Issue date Jun 15, 2021
- ASML Netherlands B.V.
- Hakki Ergün Cekli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic method
- Patent number 11,029,610
- Issue date Jun 8, 2021
- ASML Netherlands B.V.
- Patricius Aloysius Jacobus Tinnemans
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Patterning device cooling apparatus
- Patent number 10,642,166
- Issue date May 5, 2020
- ASML Holding N.V.
- Güneş Nakiboglu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Method of determining a position of a feature
- Patent number 10,578,980
- Issue date Mar 3, 2020
- ASML Netherlands B.V.
- Ralph Timotheus Huijgen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus, device manufacturing method and associated...
- Patent number 10,025,193
- Issue date Jul 17, 2018
- ASML Netherlands B.V.
- Hakki Ergün Cekli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Metrology method and apparatus, computer program and lithographic s...
- Patent number 9,879,988
- Issue date Jan 30, 2018
- ASML Netherlands B.V.
- Xing Lan Liu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Deformation pattern recognition method, pattern transferring method...
- Patent number 9,753,377
- Issue date Sep 5, 2017
- ASML Netherlands B.V.
- Hakki Ergun Cekli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
DEVICE MANUFACTURING METHODS
- Publication number 20230004095
- Publication date Jan 5, 2023
- ASML NETHERLANDS B.V.
- Rizvi RAHMAN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR DETERMINING ROOT CAUSE AFFECTING YIELD IN A SEMICONDUCTO...
- Publication number 20210389677
- Publication date Dec 16, 2021
- ASML NETHERLANDS B.V.
- Chenxi LIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD TO LABEL SUBSTRATES BASED ON PROCESS PARAMETERS
- Publication number 20200356881
- Publication date Nov 12, 2020
- ASML NETHERLANDS B.V.
- Vahid BASTANI
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
LITHOGRAPHIC METHOD
- Publication number 20200272061
- Publication date Aug 27, 2020
- ASML NETHERLANDS B.V.
- Patricius Aloysius Jacobus TINNEMANS
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
DEVICE MANUFACTURING METHODS
- Publication number 20200201191
- Publication date Jun 25, 2020
- ASML NETHERLANDS B.V.
- Rizvi RAHMAN
- G05 - CONTROLLING REGULATING
Information Patent Application
METHOD OF DETERMINING A POSITION OF A FEATURE
- Publication number 20200150547
- Publication date May 14, 2020
- ASML NETHERLANDS B.V.
- Ralph Timotheus HUIJGEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
PATTERNING DEVICE COOLING SYSTEM AND METHOD OF THERMALLY CONDITIONI...
- Publication number 20200103767
- Publication date Apr 2, 2020
- ASML NETHERLANDS B.V.
- Hakki Ergün CEKLI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
METHOD OF DETERMINING A POSITION OF A FEATURE
- Publication number 20190339211
- Publication date Nov 7, 2019
- Ralph Timotheus HUIJGEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND ASSOCIATED...
- Publication number 20160334712
- Publication date Nov 17, 2016
- ASML NETHERLANDS B.V.
- Hakki Ergün CEKLI
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
Metrology Method and Apparatus, Computer Program and Lithographic S...
- Publication number 20160223322
- Publication date Aug 4, 2016
- ASML Netherlands B.V.
- Xing Lan LIU
- G01 - MEASURING TESTING
Information Patent Application
DEFORMATION PATTERN RECOGNITION METHOD, PATTERN TRANSFERRING METHOD...
- Publication number 20150205213
- Publication date Jul 23, 2015
- ASML NETHERLANDS B.V.
- Hakki Ergun Cekli
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hakki Ergun Cekli

Person

Patents Grantslast 30 patents

Device manufacturing methods

Method for determining root cause affecting yield in a semiconducto...

Device manufacturing methods

Method of determining a position of a feature

Patterning device cooling system and method of thermally conditioni...

Lithographic method

Patterning device cooling apparatus

Method of determining a position of a feature

Lithographic apparatus, device manufacturing method and associated...

Metrology method and apparatus, computer program and lithographic s...

Deformation pattern recognition method, pattern transferring method...

Patents Applicationslast 30 patents

DEVICE MANUFACTURING METHODS

METHOD FOR DETERMINING ROOT CAUSE AFFECTING YIELD IN A SEMICONDUCTO...

METHOD TO LABEL SUBSTRATES BASED ON PROCESS PARAMETERS

LITHOGRAPHIC METHOD

DEVICE MANUFACTURING METHODS

METHOD OF DETERMINING A POSITION OF A FEATURE

PATTERNING DEVICE COOLING SYSTEM AND METHOD OF THERMALLY CONDITIONI...

METHOD OF DETERMINING A POSITION OF A FEATURE

LITHOGRAPHIC APPARATUS, DEVICE MANUFACTURING METHOD AND ASSOCIATED...

Metrology Method and Apparatus, Computer Program and Lithographic S...

DEFORMATION PATTERN RECOGNITION METHOD, PATTERN TRANSFERRING METHOD...