Hakki Ufuk Alpay

Person

Poughquag, NY, US

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method for optimizing a pellicle for off-axis transmi...
- Patent number 7,271,950
- Issue date Sep 18, 2007
- Toppan Photomasks, Inc.
- Joseph S Gordon
- G02 - OPTICS
Information Patent Grant
Method and apparatus for coupling a pellicle to a photomask using a...
- Patent number 6,911,283
- Issue date Jun 28, 2005
- Dupont Photomasks, Inc.
- Joseph Stephen Gordon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask and method for forming an opaque border on the same
- Patent number 6,803,158
- Issue date Oct 12, 2004
- Dupont Photomasks, Inc.
- Joseph Stephen Gordon
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask with back-side anti-reflective layer and method of manufa...
- Patent number 6,797,439
- Issue date Sep 28, 2004
- Schott Lithotec AG
- Hakki Ufuk Alpay
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask blanks
- Patent number 5,459,002
- Issue date Oct 17, 1995
- E. I. Du Pont de Nemours and Company
- Hakki U. Alpay
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask blanks comprising transmissive embedded phase shifter
- Patent number 5,415,953
- Issue date May 16, 1995
- E. I. Du Pont de Nemours and Company
- Hakki U. Alpay
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Photomask blank and process for making a photomask blank using grad...
- Patent number 5,230,971
- Issue date Jul 27, 1993
- E. I. Du Pont de Nemours and Company
- Hakki U. Alpay
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
Methods for producing photomask blanks, cluster tool apparatus for...
- Publication number 20080041716
- Publication date Feb 21, 2008
- Schott Lithotec USA Corporation
- Hakki Ufuk Alpay
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Hakki Ufuk Alpay

Person

Patents Grantslast 30 patents

Apparatus and method for optimizing a pellicle for off-axis transmi...

Method and apparatus for coupling a pellicle to a photomask using a...

Photomask and method for forming an opaque border on the same

Photomask with back-side anti-reflective layer and method of manufa...

Photomask blanks

Photomask blanks comprising transmissive embedded phase shifter

Photomask blank and process for making a photomask blank using grad...

Patents Applicationslast 30 patents

Methods for producing photomask blanks, cluster tool apparatus for...