HAKSEOK LEE

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HWASEONG-SI, KR

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Patents Grantslast 30 patents

Information Patent Grant
Apparatus for generating extreme ultraviolet (EUV), method of manuf...
- Patent number 11,729,896
- Issue date Aug 15, 2023
- Samsung Electronics Co., Ltd.
- Jihoon Na
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR GENERATING EXTREME ULTRAVIOLET (EUV), METHOD OF MANUF...
- Publication number 20220167492
- Publication date May 26, 2022
- Research & Business Foundation Sungkyunkwan University
- JIHOON NA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR