Hakseung Han

Person

Hwaseong-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Apparatus and method of measuring uniformity based on pupil image a...
- Patent number 12,260,539
- Issue date Mar 25, 2025
- Samsung Electronics Co., Ltd.
- Minho Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of annealing reflective photomask by using laser
- Patent number 11,934,092
- Issue date Mar 19, 2024
- Samsung Electronics Co., Ltd.
- Hakseung Han
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Grant
Apparatus and method for measuring phase of extreme ultraviolet (EU...
- Patent number 11,852,583
- Issue date Dec 26, 2023
- Samsung Electronics Co., Ltd.
- Jongju Park
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method for measuring phase of extreme ultraviolet (EU...
- Patent number 11,635,371
- Issue date Apr 25, 2023
- Samsung Electronics Co., Ltd.
- Jongju Park
- G01 - MEASURING TESTING
Information Patent Grant
Apparatus and method of measuring uniformity based on pupil image a...
- Patent number 11,562,477
- Issue date Jan 24, 2023
- Samsung Electronics Co., Ltd.
- Minho Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Grant
Method of annealing reflective photomask by using laser
- Patent number 11,506,968
- Issue date Nov 22, 2022
- Samsung Electronics Co., Ltd.
- Hakseung Han
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR

Patents Applicationslast 30 patents

Information Patent Application
METHOD OF ANNEALING REFLECTIVE PHOTOMASK BY USING LASER
- Publication number 20240184192
- Publication date Jun 6, 2024
- Samsung Electronics Co., Ltd.
- Hakseung Han
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHOD FOR MEASURING PHASE OF EXTREME ULTRAVIOLET (EU...
- Publication number 20230236124
- Publication date Jul 27, 2023
- Samsung Electronics Co., Ltd.
- Jongju Park
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS AND METHOD OF MEASURING UNIFORMITY BASED ON PUPIL IMAGE A...
- Publication number 20230142328
- Publication date May 11, 2023
- Samsung Electronics Co., Ltd.
- Minho Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
METHOD OF ANNEALING REFLECTIVE PHOTOMASK BY USING LASER
- Publication number 20230073206
- Publication date Mar 9, 2023
- Samsung Electronics Co., Ltd.
- Hakseung Han
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
APPARATUS AND METHOD OF MEASURING UNIFORMITY BASED ON PUPIL IMAGE A...
- Publication number 20220012871
- Publication date Jan 13, 2022
- Samsung Electronics Co., Ltd.
- Minho Kim
- G06 - COMPUTING CALCULATING COUNTING
Information Patent Application
APPARATUS AND METHOD FOR MEASURING PHASE OF EXTREME ULTRAVIOLET (EU...
- Publication number 20210293701
- Publication date Sep 23, 2021
- Samsung Electronics Co., Ltd.
- Jongju Park
- G01 - MEASURING TESTING
Information Patent Application
METHOD OF ANNEALING REFLECTIVE PHOTOMASK BY USING LASER
- Publication number 20210223680
- Publication date Jul 22, 2021
- Samsung Electronics Co., Ltd.
- Hakseung Han
- B23 - MACHINE TOOLS METAL-WORKING NOT OTHERWISE PROVIDED FOR
Information Patent Application
EXTREME ULTRAVIOLET PHOTOMASK MANUFACTURING METHOD AND SEMICONDUCTO...
- Publication number 20210033959
- Publication date Feb 4, 2021
- Samsung Electronics Co., Ltd.
- Hakseung Han
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Hakseung Han

Person

Patents Grantslast 30 patents

Apparatus and method of measuring uniformity based on pupil image a...

Method of annealing reflective photomask by using laser

Apparatus and method for measuring phase of extreme ultraviolet (EU...

Apparatus and method for measuring phase of extreme ultraviolet (EU...

Apparatus and method of measuring uniformity based on pupil image a...

Method of annealing reflective photomask by using laser

Patents Applicationslast 30 patents

METHOD OF ANNEALING REFLECTIVE PHOTOMASK BY USING LASER

APPARATUS AND METHOD FOR MEASURING PHASE OF EXTREME ULTRAVIOLET (EU...

APPARATUS AND METHOD OF MEASURING UNIFORMITY BASED ON PUPIL IMAGE A...

METHOD OF ANNEALING REFLECTIVE PHOTOMASK BY USING LASER

APPARATUS AND METHOD OF MEASURING UNIFORMITY BASED ON PUPIL IMAGE A...

APPARATUS AND METHOD FOR MEASURING PHASE OF EXTREME ULTRAVIOLET (EU...

METHOD OF ANNEALING REFLECTIVE PHOTOMASK BY USING LASER

EXTREME ULTRAVIOLET PHOTOMASK MANUFACTURING METHOD AND SEMICONDUCTO...