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Haku KOMORI
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Tokyo, JP
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Patents Grants
last 30 patents
Information
Patent Grant
Epitaxial growth apparatus and method of producing epitaxial wafer
Patent number
12,129,543
Issue date
Oct 29, 2024
Sumco Corporation
Haku Komori
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Vapor deposition device and method for manufacturing epitaxial sili...
Patent number
11,846,039
Issue date
Dec 19, 2023
Sumco Corporation
Kazuhiro Narahara
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Epitaxial growth apparatus, preheat ring, and method of manufacturi...
Patent number
10,975,495
Issue date
Apr 13, 2021
Sumco Corporation
Haku Komori
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
EPITAXIAL GROWTH APPARATUS AND METHOD OF PRODUCING EPITAXIAL WAFER
Publication number
20220251726
Publication date
Aug 11, 2022
SUMCO CORPORATION
Haku KOMORI
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
VAPOR DEPOSITION DEVICE AND METHOD FOR MANUFACTURING EPITAXIAL SILI...
Publication number
20220106704
Publication date
Apr 7, 2022
SUMCO CORPORATION
Kazuhiro NARAHARA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
WAFER TRANSPORT DEVICE, VAPOR DEPOSITION DEVICE, WAFER TRANSPORT ME...
Publication number
20220106705
Publication date
Apr 7, 2022
SUMCO CORPORATION
Kazuhiro NARAHARA
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
EPITAXIAL GROWTH APPARATUS, PREHEAT RING, AND METHOD OF MANUFACTURI...
Publication number
20200354853
Publication date
Nov 12, 2020
SUMCO CORPORATION
Haku KOMORI
C30 - CRYSTAL GROWTH