Hakyoung Kim

Person

Bucheon-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Method of manufacturing semiconductor device
- Patent number 11,948,777
- Issue date Apr 2, 2024
- Samsung Electronics Co., Ltd.
- Yonghee Kim
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing apparatus
- Patent number 11,605,529
- Issue date Mar 14, 2023
- Samsung Electronics Co., Ltd.
- Hakyoung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck and substrate processing apparatus including th...
- Patent number 11,404,252
- Issue date Aug 2, 2022
- Samsung Electronics Co., Ltd.
- Byeongsang Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate inspection apparatus and substrate processing system incl...
- Patent number 10,861,724
- Issue date Dec 8, 2020
- Samsung Electronics Co., Ltd.
- Jongwoo Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma treatment system including cover plate to insulate window
- Patent number 10,431,432
- Issue date Oct 1, 2019
- Samsung Electronics Co., Ltd.
- Jongwoo Sun
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...
- Publication number 20230282453
- Publication date Sep 7, 2023
- Samsung Electronics Co., Ltd.
- HAKYOUNG KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, A...
- Publication number 20230245864
- Publication date Aug 3, 2023
- Samsung Electronics Co., Ltd.
- HAKYOUNG KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, A...
- Publication number 20230187185
- Publication date Jun 15, 2023
- Samsung Electronics Co., Ltd.
- SUMIN PARK
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20230005713
- Publication date Jan 5, 2023
- Samsung Electronics Co., Ltd.
- Yonghee KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
PLASMA PROCESSING APPARATUS
- Publication number 20220051873
- Publication date Feb 17, 2022
- Samsung Electronics Co., Ltd.
- Hakyoung Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK AND SUBSTRATE PROCESSING APPARATUS INCLUDING TH...
- Publication number 20210111007
- Publication date Apr 15, 2021
- Samsung Electronics Co., Ltd.
- Byeongsang KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE INSPECTION APPARATUS AND SUBSTRATE PROCESSING SYSTEM INCL...
- Publication number 20190080944
- Publication date Mar 14, 2019
- Samsung Electronics Co., Ltd.
- Jongwoo SUN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Cover Plate, Plasma Treatment System Including the Same and Plasma...
- Publication number 20170047235
- Publication date Feb 16, 2017
- Samsung Electronics Co., Ltd.
- Jongwoo Sun
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Plasma Processing Devices Having a Surface Protection Layer
- Publication number 20160079040
- Publication date Mar 17, 2016
- Samsung Electronics Co., Ltd.
- MyoungSoo Park
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK ASSEMBLIES HAVING RECESSED SUPPORT SURFACES, SE...
- Publication number 20160035610
- Publication date Feb 4, 2016
- Myoung Soo Park
- H01 - BASIC ELECTRIC ELEMENTS

Hakyoung Kim

Person

Patents Grantslast 30 patents

Method of manufacturing semiconductor device

Plasma processing apparatus

Electrostatic chuck and substrate processing apparatus including th...

Substrate inspection apparatus and substrate processing system incl...

Plasma treatment system including cover plate to insulate window

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS AND SUBSTRATE PROCESSING METHOD USIN...

PLASMA BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, A...

PLASMA BAFFLE, SUBSTRATE PROCESSING APPARATUS INCLUDING THE SAME, A...

METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

PLASMA PROCESSING APPARATUS

ELECTROSTATIC CHUCK AND SUBSTRATE PROCESSING APPARATUS INCLUDING TH...

SUBSTRATE INSPECTION APPARATUS AND SUBSTRATE PROCESSING SYSTEM INCL...

Cover Plate, Plasma Treatment System Including the Same and Plasma...

Plasma Processing Devices Having a Surface Protection Layer

ELECTROSTATIC CHUCK ASSEMBLIES HAVING RECESSED SUPPORT SURFACES, SE...