HALI J.L. FORSTNER

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REDWOOD CITY, CA, US

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Patents Grantslast 30 patents

Information Patent Grant
Point-of-use exhaust by-product reactor
- Patent number 6,368,567
- Issue date Apr 9, 2002
- Applied Materials, Inc.
- Paul B. Comita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method of cleaning CVD cold-wall chamber and exhaust lines
- Patent number 6,042,654
- Issue date Mar 28, 2000
- Applied Materials, Inc.
- Paul B. Comita
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
POINT-OF-USE EXHAUST BY-PRODUCT REACTOR
- Publication number 20010008618
- Publication date Jul 19, 2001
- PAUL B. COMITA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...