HAMID NOORBAKHSH

Person

Fremont, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Helical plug for reduction or prevention of arcing in a substrate s...
- Patent number 11,551,960
- Issue date Jan 10, 2023
- Applied Materials, Inc.
- Reyn T. Wakabayashi
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
L-motion slit door for substrate processing chamber
- Patent number 11,488,806
- Issue date Nov 1, 2022
- Applied Materials, Inc.
- Hamid Noorbakhsh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for reducing high voltage arcing in semicondu...
- Patent number 11,488,852
- Issue date Nov 1, 2022
- Applied Materials, Inc.
- Anwar Husain
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Temperature controlled secondary electrode for ion control at subst...
- Patent number 11,424,096
- Issue date Aug 23, 2022
- Applied Materials, Inc.
- Hamid Noorbakhsh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Seal member
- Patent number 11,384,838
- Issue date Jul 12, 2022
- Applied Materials, Inc.
- Ippei Nakagawa
- F16 - ENGINEERING ELEMENTS AND UNITS GENERAL MEASURES FOR PRODUCING AND MAINT...
Information Patent Grant
Methods and apparatus for dechucking wafers
- Patent number 11,171,030
- Issue date Nov 9, 2021
- Applied Materials, Inc.
- Hamid Noorbakhsh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead having a detachable gas distribution plate
- Patent number 11,130,142
- Issue date Sep 28, 2021
- Applied Materials, Inc.
- Dmitry Lubomirsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
High power showerhead with recursive gas flow distribution
- Patent number 10,954,595
- Issue date Mar 23, 2021
- Applied Materials, Inc.
- Hamid Noorbakhsh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Ceramic electrostatic chuck having a V-shape seal band
- Patent number 10,943,808
- Issue date Mar 9, 2021
- Applied Materials, Inc.
- Hamid Noorbakhsh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck assembly having a dielectric filler
- Patent number 10,930,540
- Issue date Feb 23, 2021
- Applied Materials, Inc.
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Extended detachable gas distribution plate and showerhead incorpora...
- Patent number 10,886,107
- Issue date Jan 5, 2021
- Applied Materials, Inc.
- Hamid Noorbakhsh
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Feedforward temperature control for plasma processing apparatus
- Patent number 10,854,425
- Issue date Dec 1, 2020
- Applied Materials, Inc.
- Chetan Mahadeswaraswamy
- G05 - CONTROLLING REGULATING
Information Patent Grant
Edge ring assembly for a substrate support in a plasma processing c...
- Patent number 10,847,347
- Issue date Nov 24, 2020
- Applied Materials, Inc.
- Hamid Noorbakhsh
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC
Information Patent Grant
Showerhead having a detachable high resistivity gas distribution plate
- Patent number 10,790,120
- Issue date Sep 29, 2020
- Applied Materials, Inc.
- Jason Della Rosa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead with reduced backside plasma ignition
- Patent number 10,745,807
- Issue date Aug 18, 2020
- Applied Materials, Inc.
- Haitao Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Two zone flow cooling plate design with concentric or spiral channe...
- Patent number 10,697,061
- Issue date Jun 30, 2020
- Applied Materials, Inc.
- Kartik Shah
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Split slit liner door
- Patent number 10,636,629
- Issue date Apr 28, 2020
- Applied Materials, Inc.
- Hamid Noorbakhsh
- E05 - LOCKS KEYS WINDOW OR DOOR FITTINGS SAFES
Information Patent Grant
Showerhead having a detachable gas distribution plate
- Patent number 10,625,277
- Issue date Apr 21, 2020
- Applied Materials, Inc.
- Dmitry Lubomirsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead having a detachable high resistivity gas distribution plate
- Patent number 10,607,816
- Issue date Mar 31, 2020
- Applied Materials, Inc.
- Jason Della Rosa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck assembly having a dielectric filler
- Patent number 10,504,765
- Issue date Dec 10, 2019
- Applied Materials, Inc.
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Showerhead with reduced backside plasma ignition
- Patent number 10,378,108
- Issue date Aug 13, 2019
- Applied Materials, Inc.
- Haitao Wang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead having an extended detachable gas distribution plate
- Patent number 10,373,810
- Issue date Aug 6, 2019
- Applied Materials, Inc.
- Hamid Noorbakhsh
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Grant
Electrostatic chuck having thermally isolated zones with minimal cr...
- Patent number 10,304,715
- Issue date May 28, 2019
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods and apparatus for controlling substrate uniformity
- Patent number 10,177,050
- Issue date Jan 8, 2019
- Applied Materials, Inc.
- S. M. Reza Sadjadi
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Electrostatic chuck having thermally isolated zones with minimal cr...
- Patent number 9,991,148
- Issue date Jun 5, 2018
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Recursive pumping for symmetrical gas exhaust to control critical d...
- Patent number 9,909,213
- Issue date Mar 6, 2018
- Applied Materials, Inc.
- Sergio Fukuda Shoji
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead having a detachable high resistivity gas distribution plate
- Patent number 9,911,579
- Issue date Mar 6, 2018
- Applied Materials, Inc.
- Jason Della Rosa
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electrostatic chuck having thermally isolated zones with minimal cr...
- Patent number 9,666,466
- Issue date May 30, 2017
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Component temperature control by coolant flow control and heater du...
- Patent number 9,639,097
- Issue date May 2, 2017
- Applied Materials, Inc.
- Chetan Mahadeswaraswamy
- G05 - CONTROLLING REGULATING
Information Patent Grant
Showerhead having a detachable gas distribution plate
- Patent number 9,610,591
- Issue date Apr 4, 2017
- Applied Materials, Inc.
- Dmitry Lubomirsky
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
L-MOTION SLIT DOOR FOR SUBSTRATE PROCESSING CHAMBER
- Publication number 20210351014
- Publication date Nov 11, 2021
- Applied Materials, Inc.
- Hamid NOORBAKHSH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HELICAL PLUG FOR REDUCTION OR PREVENTION OF ARCING IN A SUBSTRATE S...
- Publication number 20210242063
- Publication date Aug 5, 2021
- Applied Materials, Inc.
- REYN T. WAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
V-shape seal band for a semiconductor processing chamber
- Publication number 20210183680
- Publication date Jun 17, 2021
- Applied Materials, Inc.
- Hamid NOORBAKHSH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TEMPERATURE CONTROLLED SECONDARY ELECTRODE FOR ION CONTROL AT SUBST...
- Publication number 20210134554
- Publication date May 6, 2021
- Applied Materials, Inc.
- HAMID NOORBAKHSH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING ASSEMBLY FOR A SUBSTRATE SUPPORT IN A PLASMA PROCESSING C...
- Publication number 20210043428
- Publication date Feb 11, 2021
- Applied Materials, Inc.
- Hamid NOORBAKHSH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
HIGH POWER SHOWERHEAD WITH RECURSIVE GAS FLOW DISTRIBUTION
- Publication number 20210032752
- Publication date Feb 4, 2021
- Applied Materials, Inc.
- Hamid Noorbakhsh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
APPARATUS FOR REDUCTION OR PREVENTION OF ARCING IN A SUBSTRATE SUPPORT
- Publication number 20200411355
- Publication date Dec 31, 2020
- Applied Materials, Inc.
- Hamid NOORBAKHSH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR REDUCING HIGH VOLTAGE ARCING IN SEMICONDU...
- Publication number 20200381282
- Publication date Dec 3, 2020
- Applied Materials, Inc.
- Anwar HUSAIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
STRAY PLASMA PREVENTION APPARATUS FOR SUBSTRATE PROCESS CHAMBER
- Publication number 20200365375
- Publication date Nov 19, 2020
- Applied Materials, Inc.
- Reyn WAKABAYASHI
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR DECHUCKING WAFERS
- Publication number 20200357675
- Publication date Nov 12, 2020
- Applied Materials, Inc.
- HAMID NOORBAKHSH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD HAVING A DETACHABLE GAS DISTRIBUTION PLATE
- Publication number 20200238303
- Publication date Jul 30, 2020
- Applied Materials, Inc.
- Dmitry LUBOMIRSKY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD HAVING A DETACHABLE HIGH RESISTIVITY GAS DISTRIBUTION PLATE
- Publication number 20200194229
- Publication date Jun 18, 2020
- Applied Materials, Inc.
- JASON DELLA ROSA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EDGE RING ASSEMBLY FOR A SUBSTRATE SUPPORT IN A PLASMA PROCESSING C...
- Publication number 20200066495
- Publication date Feb 27, 2020
- Applied Materials, Inc.
- Hamid NOORBAKHSH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK ASSEMBLY HAVING A DIELECTRIC FILLER
- Publication number 20200066566
- Publication date Feb 27, 2020
- Applied Materials, Inc.
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR PLASMA LINERS WITH HIGH FLUID CONDUCTANCE
- Publication number 20200066493
- Publication date Feb 27, 2020
- Applied Materials, Inc.
- HAMID NOORBAKHSH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
EXTENDED DETACHABLE GAS DISTRIBUTION PLATE AND SHOWERHEAD INCORPORA...
- Publication number 20190326100
- Publication date Oct 24, 2019
- Applied Materials, Inc.
- Hamid Noorbakhsh
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SHOWERHEAD WITH REDUCED BACKSIDE PLASMA IGNITION
- Publication number 20190271082
- Publication date Sep 5, 2019
- Applied Materials, Inc.
- Haitao WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SPLIT SLIT LINER DOOR
- Publication number 20190108983
- Publication date Apr 11, 2019
- Applied Materials, Inc.
- Hamid NOORBAKHSH
- E05 - LOCKS KEYS WINDOW OR DOOR FITTINGS SAFES
Information Patent Application
Electrostatic Chuck Assembly Having A Dielectric Filler
- Publication number 20180308736
- Publication date Oct 25, 2018
- Applied Materials, Inc.
- Kartik Ramaswamy
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTROSTATIC CHUCK HAVING THERMALLY ISOLATED ZONES WITH MINIMAL CR...
- Publication number 20180269098
- Publication date Sep 20, 2018
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD HAVING A DETACHABLE HIGH RESISTIVITY GAS DISTRIBUTION PLATE
- Publication number 20180190473
- Publication date Jul 5, 2018
- JASON DELLA ROSA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CERAMIC ELECTROSTATIC CHUCK HAVING A V-SHAPE SEAL BAND
- Publication number 20180151402
- Publication date May 31, 2018
- Applied Materials, Inc.
- Hamid NOORBAKHSH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TWO ZONE FLOW COOLING PLATE DESIGN WITH CONCENTRIC OR SPIRAL CHANNE...
- Publication number 20180142352
- Publication date May 24, 2018
- Applied Materials, Inc.
- Kartik SHAH
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
RECURSIVE PUMPING FOR SYMMETRICAL GAS EXHAUST TO CONTROL CRITICAL D...
- Publication number 20180142354
- Publication date May 24, 2018
- Applied Materials, Inc.
- Sergio Fukuda SHOJI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK HAVING THERMALLY ISOLATED ZONES WITH MINIMAL CR...
- Publication number 20170250100
- Publication date Aug 31, 2017
- Applied Materials, Inc.
- Vijay D. Parkhe
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SHOWERHEAD HAVING AN EXTENDED DETACHABLE GAS DISTRIBUTION PLATE
- Publication number 20170243724
- Publication date Aug 24, 2017
- Applied Materials, Inc.
- Hamid Noorbakhsh
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SHOWERHEAD HAVING A DETACHABLE GAS DISTRIBUTION PLATE
- Publication number 20170178863
- Publication date Jun 22, 2017
- Applied Materials, Inc.
- DMITRY LUBOMIRSKY
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
SHOWERHEAD WITH REDUCED BACKSIDE PLASMA IGNITION
- Publication number 20170101713
- Publication date Apr 13, 2017
- Applied Materials, Inc.
- Haitao WANG
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CONTROLLING SUBSTRATE UNIFORMITY
- Publication number 20160329256
- Publication date Nov 10, 2016
- Applied Materials, Inc.
- S. M. Reza SADJADI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS
- Publication number 20160155612
- Publication date Jun 2, 2016
- Chetan MAHADESWARASWAMY
- H01 - BASIC ELECTRIC ELEMENTS

HAMID NOORBAKHSH

Person

Patents Grantslast 30 patents

Helical plug for reduction or prevention of arcing in a substrate s...

L-motion slit door for substrate processing chamber

Methods and apparatus for reducing high voltage arcing in semicondu...

Temperature controlled secondary electrode for ion control at subst...

Seal member

Methods and apparatus for dechucking wafers

Showerhead having a detachable gas distribution plate

High power showerhead with recursive gas flow distribution

Ceramic electrostatic chuck having a V-shape seal band

Electrostatic chuck assembly having a dielectric filler

Extended detachable gas distribution plate and showerhead incorpora...

Feedforward temperature control for plasma processing apparatus

Edge ring assembly for a substrate support in a plasma processing c...

Showerhead having a detachable high resistivity gas distribution plate

Showerhead with reduced backside plasma ignition

Two zone flow cooling plate design with concentric or spiral channe...

Split slit liner door

Showerhead having a detachable gas distribution plate

Showerhead having a detachable high resistivity gas distribution plate

Electrostatic chuck assembly having a dielectric filler

Showerhead with reduced backside plasma ignition

Showerhead having an extended detachable gas distribution plate

Electrostatic chuck having thermally isolated zones with minimal cr...

Methods and apparatus for controlling substrate uniformity

Electrostatic chuck having thermally isolated zones with minimal cr...

Recursive pumping for symmetrical gas exhaust to control critical d...

Showerhead having a detachable high resistivity gas distribution plate

Electrostatic chuck having thermally isolated zones with minimal cr...

Component temperature control by coolant flow control and heater du...

Showerhead having a detachable gas distribution plate

Patents Applicationslast 30 patents

L-MOTION SLIT DOOR FOR SUBSTRATE PROCESSING CHAMBER

HELICAL PLUG FOR REDUCTION OR PREVENTION OF ARCING IN A SUBSTRATE S...

V-shape seal band for a semiconductor processing chamber

TEMPERATURE CONTROLLED SECONDARY ELECTRODE FOR ION CONTROL AT SUBST...

EDGE RING ASSEMBLY FOR A SUBSTRATE SUPPORT IN A PLASMA PROCESSING C...

HIGH POWER SHOWERHEAD WITH RECURSIVE GAS FLOW DISTRIBUTION

APPARATUS FOR REDUCTION OR PREVENTION OF ARCING IN A SUBSTRATE SUPPORT

METHODS AND APPARATUS FOR REDUCING HIGH VOLTAGE ARCING IN SEMICONDU...

STRAY PLASMA PREVENTION APPARATUS FOR SUBSTRATE PROCESS CHAMBER

METHODS AND APPARATUS FOR DECHUCKING WAFERS

SHOWERHEAD HAVING A DETACHABLE GAS DISTRIBUTION PLATE

SHOWERHEAD HAVING A DETACHABLE HIGH RESISTIVITY GAS DISTRIBUTION PLATE

EDGE RING ASSEMBLY FOR A SUBSTRATE SUPPORT IN A PLASMA PROCESSING C...

ELECTROSTATIC CHUCK ASSEMBLY HAVING A DIELECTRIC FILLER

METHODS AND APPARATUS FOR PLASMA LINERS WITH HIGH FLUID CONDUCTANCE

EXTENDED DETACHABLE GAS DISTRIBUTION PLATE AND SHOWERHEAD INCORPORA...

SHOWERHEAD WITH REDUCED BACKSIDE PLASMA IGNITION

SPLIT SLIT LINER DOOR

Electrostatic Chuck Assembly Having A Dielectric Filler

ELECTROSTATIC CHUCK HAVING THERMALLY ISOLATED ZONES WITH MINIMAL CR...

SHOWERHEAD HAVING A DETACHABLE HIGH RESISTIVITY GAS DISTRIBUTION PLATE

CERAMIC ELECTROSTATIC CHUCK HAVING A V-SHAPE SEAL BAND

TWO ZONE FLOW COOLING PLATE DESIGN WITH CONCENTRIC OR SPIRAL CHANNE...

RECURSIVE PUMPING FOR SYMMETRICAL GAS EXHAUST TO CONTROL CRITICAL D...

ELECTROSTATIC CHUCK HAVING THERMALLY ISOLATED ZONES WITH MINIMAL CR...

SHOWERHEAD HAVING AN EXTENDED DETACHABLE GAS DISTRIBUTION PLATE

SHOWERHEAD HAVING A DETACHABLE GAS DISTRIBUTION PLATE

SHOWERHEAD WITH REDUCED BACKSIDE PLASMA IGNITION

METHODS AND APPARATUS FOR CONTROLLING SUBSTRATE UNIFORMITY

FEEDFORWARD TEMPERATURE CONTROL FOR PLASMA PROCESSING APPARATUS