Han Henricus Aldegonda Lempens

Person

Weert, NL

People

Patents Grantslast 30 patents

Information Patent Grant
Lithography apparatus and device manufacturing method
- Patent number 11,774,857
- Issue date Oct 3, 2023
- ASML Netherlands B.V.
- Erik Henricus Egidius Catharina Eummelen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure and lithographic apparatus
- Patent number 11,614,689
- Issue date Mar 28, 2023
- ASML Netherlands B.V.
- Erik Henricus Egidius Catharina Eummelen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Lithography apparatus and device manufacturing method
- Patent number 11,372,336
- Issue date Jun 28, 2022
- ASML Netherlands B.V.
- Erik Henricus Egidius Catharina Eummelen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure and lithographic apparatus
- Patent number 11,231,653
- Issue date Jan 25, 2022
- ASML Netherlands B.V.
- Erik Henricus Egidius Catharina Eummelen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cleaning device and method of cleaning
- Patent number 11,086,239
- Issue date Aug 10, 2021
- ASML Netherlands B.V.
- Miao Yu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure and lithographic apparatus
- Patent number 10,969,695
- Issue date Apr 6, 2021
- ASML Netherlands B.V.
- Erik Henricus Egidius Catharina Eummelen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Object holder and lithographic apparatus
- Patent number 10,481,502
- Issue date Nov 19, 2019
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure and lithographic apparatus
- Patent number 10,416,571
- Issue date Sep 17, 2019
- ASML Netherlands B.V.
- Erik Henricus Egidius Catharina Eummelen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 10,268,127
- Issue date Apr 23, 2019
- ASML Netherlands B.V.
- Michel Riepen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Immersion lithographic apparatus and device manufacturing method
- Patent number 10,001,712
- Issue date Jun 19, 2018
- ASML Netherlands B.V.
- Theodorus Wilhelmus Polet
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Object holder and lithographic apparatus
- Patent number 9,915,877
- Issue date Mar 13, 2018
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Object holder and lithographic apparatus
- Patent number 9,785,055
- Issue date Oct 10, 2017
- ASML Netherlands B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 9,645,506
- Issue date May 9, 2017
- ASML Netherlands B.V.
- Michel Riepen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,681,308
- Issue date Mar 25, 2014
- ASML Netherlands B.V.
- Paul Petrus Joannes Berkvens
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Lithographic apparatus and device manufacturing method
- Patent number 8,634,053
- Issue date Jan 21, 2014
- ASML Netherlands B.V.
- Michel Riepen
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Fluid handling structure, lithographic apparatus and device manufac...
- Patent number 8,472,003
- Issue date Jun 25, 2013
- ASML Netherlands B.V.
- Hrishikesh Patel
- Y10 - TECHNICAL SUBJECTS COVERED BY FORMER USPC

Patents Applicationslast 30 patents

Information Patent Application
LITHOGRAPHY APPARATUS AND A METHOD OF MANUFACTURING A DEVICE
- Publication number 20240036477
- Publication date Feb 1, 2024
- ASML NETHERLANDS B.V.
- Erik Henricus Egidius Catharina EUMMELEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20220308459
- Publication date Sep 29, 2022
- ASML NETHERLANDS B.V.
- Erik Henricus Egidius Catharina EUMMELEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
- Publication number 20220137519
- Publication date May 5, 2022
- ASML NETHERLANDS B.V.
- Erik Henricus Egidius Catharina EUMMELEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
- Publication number 20210181641
- Publication date Jun 17, 2021
- ASML NETHERLANDS B.V.
- Erik Henricus Egidius Catharina EUMMELEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEANING DEVICE AND METHOD OF CLEANING
- Publication number 20210116824
- Publication date Apr 22, 2021
- ASML NETHERLANDS B.V.
- Miao YU
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20210096471
- Publication date Apr 1, 2021
- ASML NETHERLANDS B.V.
- Erik Henricus Egidius Catharina EUMMELEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
- Publication number 20200004162
- Publication date Jan 2, 2020
- ASML NETHERLANDS H.V.
- Erik Henricus Egidius Catharina EUMMELEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS
- Publication number 20190004434
- Publication date Jan 3, 2019
- ASML NETHERLANDS B.V.
- Erik Henricus Egidius Catharina EUMMELEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
- Publication number 20180267412
- Publication date Sep 20, 2018
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu LAURENT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
- Publication number 20170315454
- Publication date Nov 2, 2017
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu LAURENT
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170242348
- Publication date Aug 24, 2017
- ASML NETHERLANDS B.V.
- Michel RIEPEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20170219939
- Publication date Aug 3, 2017
- ASML NETHERLANDS B.V.
- Theodorus Wilhelmus POLET
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
OBJECT HOLDER AND LITHOGRAPHIC APPARATUS
- Publication number 20150131064
- Publication date May 14, 2015
- ASML NETHERLANDS B.V.
- Thibault Simon Mathieu Laurent
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Application
LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD
- Publication number 20140098353
- Publication date Apr 10, 2014
- ASML NETHERLANDS B.V.
- Michel RIEPEN
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY

Han Henricus Aldegonda Lempens

Person

Patents Grantslast 30 patents

Lithography apparatus and device manufacturing method

Fluid handling structure and lithographic apparatus

Lithography apparatus and device manufacturing method

Fluid handling structure and lithographic apparatus

Cleaning device and method of cleaning

Fluid handling structure and lithographic apparatus

Object holder and lithographic apparatus

Fluid handling structure and lithographic apparatus

Lithographic apparatus and device manufacturing method

Immersion lithographic apparatus and device manufacturing method

Object holder and lithographic apparatus

Object holder and lithographic apparatus

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Lithographic apparatus and device manufacturing method

Fluid handling structure, lithographic apparatus and device manufac...

Patents Applicationslast 30 patents

LITHOGRAPHY APPARATUS AND A METHOD OF MANUFACTURING A DEVICE

LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD

FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS

FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS

CLEANING DEVICE AND METHOD OF CLEANING

LITHOGRAPHY APPARATUS AND DEVICE MANUFACTURING METHOD

FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS

FLUID HANDLING STRUCTURE AND LITHOGRAPHIC APPARATUS

OBJECT HOLDER AND LITHOGRAPHIC APPARATUS

OBJECT HOLDER AND LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

IMMERSION LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD

OBJECT HOLDER AND LITHOGRAPHIC APPARATUS

LITHOGRAPHIC APPARATUS AND DEVICE MANUFACTURING METHOD