Han Kyu-hee

Person

Hwaseong-si, KR

People

Patents Grantslast 30 patents

Information Patent Grant
Integrated circuit device including air gaps and method of manufact...
- Patent number 11,862,514
- Issue date Jan 2, 2024
- Samsung Electronics Co., Ltd.
- Sanghoon Ahn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of manufacturing semiconductor device
- Patent number 11,646,263
- Issue date May 9, 2023
- Samsung Electronics Co., Ltd.
- Wookyung You
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated circuit device including air gaps and method of manufact...
- Patent number 11,515,201
- Issue date Nov 29, 2022
- Samsung Electronics Co., Ltd.
- Sanghoon Ahn
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Electron beam generator, plasma processing apparatus having the sam...
- Patent number 11,195,696
- Issue date Dec 7, 2021
- Samsung Electronics Co., Ltd.
- Dongkyu Shin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device
- Patent number 11,133,249
- Issue date Sep 28, 2021
- Samsung Electronics Co., Ltd.
- Yeonggil Kim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Substrate cleaning method, substrate cleaning apparatus, and method...
- Patent number 10,998,185
- Issue date May 4, 2021
- Samsung Electronics Co., Ltd.
- Beomjin Yoo
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing system, electron beam generator, and method of fa...
- Patent number 10,522,332
- Issue date Dec 31, 2019
- Samsung Electronics Co., Ltd.
- Yeongkwang Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of forming a semiconductor device with an injector having fi...
- Patent number 10,381,461
- Issue date Aug 13, 2019
- Samsung Electronics Co., Ltd.
- Namjin Cho
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Plasma processing system, electron beam generator, and method of fa...
- Patent number 10,347,468
- Issue date Jul 9, 2019
- Samsung Electronics Co., Ltd.
- Yeongkwang Lee
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and method of fabricating the same
- Patent number 10,199,325
- Issue date Feb 5, 2019
- Samsung Electronics Co., Ltd.
- Taejin Yim
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Multi-tip spark discharge generator and method for producing nanopa...
- Patent number 9,669,423
- Issue date Jun 6, 2017
- Global Frontier Center—Multiscale Energy Systems
- Man Soo Choi
- B82 - NANO-TECHNOLOGY
Information Patent Grant
Process for preparing nanoparticle embedded electronic device
- Patent number 9,349,976
- Issue date May 24, 2016
- SNU R&DB Foundation
- Changsoon Kim
- Y02 - TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMA...
Information Patent Grant
Method of forming through silicon via of semiconductor device using...
- Patent number 8,872,354
- Issue date Oct 28, 2014
- Samsung Electronics Co., Ltd.
- Han Kyu-hee
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...
- Publication number 20240085812
- Publication date Mar 14, 2024
- Samsung Electronics Co., Ltd.
- Kyuhee Han
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
GAS SUPPLY MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME
- Publication number 20230187178
- Publication date Jun 15, 2023
- Samsung Electronics Co., Ltd.
- Youngil KANG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PHYSICAL VAPOR DEPOSITION APPARATUS
- Publication number 20230175113
- Publication date Jun 8, 2023
- Samsung Electronics Co., Ltd.
- Jaesuk KIM
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED CIRCUIT DEVICE INCLUDING AIR GAPS AND METHOD OF MANUFACT...
- Publication number 20230072375
- Publication date Mar 9, 2023
- Samsung Electronics Co., Ltd.
- Sanghoon AHN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE
- Publication number 20210391254
- Publication date Dec 16, 2021
- Samsung Electronics Co., Ltd.
- Wookyung You
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...
- Publication number 20210151300
- Publication date May 20, 2021
- Samsung Electronics Co., Ltd.
- Jieun JUNG
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
INTEGRATED CIRCUIT DEVICE AND METHOD OF MANUFACTURING THE SAME
- Publication number 20210125856
- Publication date Apr 29, 2021
- Samsung Electronics Co., Ltd.
- Sanghoon AHN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ELECTRON BEAM GENERATOR, PLASMA PROCESSING APPARATUS HAVING THE SAM...
- Publication number 20210110997
- Publication date Apr 15, 2021
- Samsung Electronics Co., Ltd.
- Dongkyu SHIN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE
- Publication number 20210043561
- Publication date Feb 11, 2021
- Samsung Electronics Co., Ltd.
- YEONGGIL KIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS, AND METHOD...
- Publication number 20190295843
- Publication date Sep 26, 2019
- Samsung Electronics Co., Ltd.
- Beomjin YOO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING SYSTEM, ELECTRON BEAM GENERATOR, AND METHOD OF FA...
- Publication number 20190279846
- Publication date Sep 12, 2019
- Samsung Electronics Co., Ltd.
- YEONGKWANG LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING SYSTEM, ELECTRON BEAM GENERATOR, AND METHOD OF FA...
- Publication number 20190122860
- Publication date Apr 25, 2019
- Samsung Electronics Co., Ltd.
- YEONGKWANG LEE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND METHOD OF...
- Publication number 20190096636
- Publication date Mar 28, 2019
- Samsung Electronics Co., Ltd.
- Sang Ki NAM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME
- Publication number 20180151490
- Publication date May 31, 2018
- Samsung Electronics Co., Ltd.
- Taejin YIM
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FILM FORMING APPARATUS HAVING AN INJECTOR
- Publication number 20170317188
- Publication date Nov 2, 2017
- Samsung Electronics Co., Ltd.
- NAMJIN CHO
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
FILM FORMING APPARATUS HAVING AN INJECTOR
- Publication number 20170011904
- Publication date Jan 12, 2017
- Namjin CHO
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MULTI-TIP SPARK DISCHARGE GENERATOR AND METHOD FOR PRODUCING NANOPA...
- Publication number 20150030781
- Publication date Jan 29, 2015
- Blobal Frontier Center for Multiscale Energy Systems
- Man Soo Choi
- B05 - SPRAYING OR ATOMISING IN GENERAL APPLYING LIQUIDS OR OTHER FLUENT MATER...
Information Patent Application
PROCESS FOR PREPARING NANOPARTICLE EMBEDDED ELECTRONIC DEVICE
- Publication number 20140159030
- Publication date Jun 12, 2014
- Changsoon Kim
- H01 - BASIC ELECTRIC ELEMENTS

Han Kyu-hee

Person

Patents Grantslast 30 patents

Integrated circuit device including air gaps and method of manufact...

Semiconductor device and method of manufacturing semiconductor device

Integrated circuit device including air gaps and method of manufact...

Electron beam generator, plasma processing apparatus having the sam...

Semiconductor device

Substrate cleaning method, substrate cleaning apparatus, and method...

Plasma processing system, electron beam generator, and method of fa...

Method of forming a semiconductor device with an injector having fi...

Plasma processing system, electron beam generator, and method of fa...

Semiconductor device and method of fabricating the same

Multi-tip spark discharge generator and method for producing nanopa...

Process for preparing nanoparticle embedded electronic device

Method of forming through silicon via of semiconductor device using...

Patents Applicationslast 30 patents

SUBSTRATE PROCESSING APPARATUS, SUBSTRATE PROCESSING SYSTEM, AND SU...

GAS SUPPLY MODULE AND SUBSTRATE PROCESSING APPARATUS USING THE SAME

PHYSICAL VAPOR DEPOSITION APPARATUS

INTEGRATED CIRCUIT DEVICE INCLUDING AIR GAPS AND METHOD OF MANUFACT...

SEMICONDUCTOR DEVICE AND METHOD OF MANUFACTURING SEMICONDUCTOR DEVICE

SUBSTRATE PROCESSING APPARATUS AND SEMICONDUCTOR DEVICE MANUFACTURI...

INTEGRATED CIRCUIT DEVICE AND METHOD OF MANUFACTURING THE SAME

ELECTRON BEAM GENERATOR, PLASMA PROCESSING APPARATUS HAVING THE SAM...

SEMICONDUCTOR DEVICE

SUBSTRATE CLEANING METHOD, SUBSTRATE CLEANING APPARATUS, AND METHOD...

PLASMA PROCESSING SYSTEM, ELECTRON BEAM GENERATOR, AND METHOD OF FA...

PLASMA PROCESSING SYSTEM, ELECTRON BEAM GENERATOR, AND METHOD OF FA...

PLASMA PROCESSING APPARATUS, PLASMA PROCESSING METHOD AND METHOD OF...

SEMICONDUCTOR DEVICE AND METHOD OF FABRICATING THE SAME

FILM FORMING APPARATUS HAVING AN INJECTOR

FILM FORMING APPARATUS HAVING AN INJECTOR

MULTI-TIP SPARK DISCHARGE GENERATOR AND METHOD FOR PRODUCING NANOPA...

PROCESS FOR PREPARING NANOPARTICLE EMBEDDED ELECTRONIC DEVICE