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Zhubei City, TW
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Patents Grants
last 30 patents
Information
Patent Grant
Semiconductor device and method
Patent number
12,125,876
Issue date
Oct 22, 2024
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuan-Cheng Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Isolation regions including two layers and method forming same
Patent number
12,051,614
Issue date
Jul 30, 2024
Taiwan Semiconductor Manufacturing Co., Ltd
Tsung Han Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device with a work function layer having a concentrat...
Patent number
11,380,549
Issue date
Jul 5, 2022
Taiwan Semiconductor Manufacturing Company, Ltd
Jung-Shiung Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Isolation regions including two layers and method forming same
Patent number
11,031,280
Issue date
Jun 8, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Tsung Han Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Contact openings and methods forming same
Patent number
10,978,341
Issue date
Apr 13, 2021
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Hung Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and methods of manufacture
Patent number
10,727,066
Issue date
Jul 28, 2020
Taiwan Semiconductor Manufacturing Company, Ltd
Jung-Shiung Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Contact openings and methods forming same
Patent number
10,510,593
Issue date
Dec 17, 2019
Taiwan Semiconductor Manufacturing Company, Ltd
Chih-Hung Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and methods of manufacture
Patent number
10,504,734
Issue date
Dec 10, 2019
Taiwan Semiconductor Manufacturing Company, Ltd
Jung-Shiung Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Semiconductor device and methods of manufacture
Patent number
10,269,569
Issue date
Apr 23, 2019
Taiwan Semiconductor Manufacturing Company, Ltd
Jung-Shiung Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Integrated bi-layer STI deposition
Patent number
9,960,074
Issue date
May 1, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Tsung Han Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Contact openings and methods forming same
Patent number
9,881,834
Issue date
Jan 30, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Hung Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Optical filtering for integrated dielectrics UV curing processes
Patent number
9,837,267
Issue date
Dec 5, 2017
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuan-Cheng Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Grant
Flowable films and methods of forming flowable films
Patent number
9,728,402
Issue date
Aug 8, 2017
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuan-Cheng Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
High density dielectric etch-stop layer
Patent number
9,379,061
Issue date
Jun 28, 2016
Taiwan Semiconductor Manufacturing Co., Ltd.
Joung-Wei Liou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of back-end-of-line (BEOL) fabrication, and devices formed b...
Patent number
9,130,022
Issue date
Sep 8, 2015
Taiwan Semiconductor Manufacturing Co., Ltd.
Shiauhan Wu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method of forming a high density dielectric etch-stop layer
Patent number
9,076,845
Issue date
Jul 7, 2015
Taiwan Semiconductor Manufacturing Co., Ltd.
Joung-Wei Liou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Hard mask for back-end-of-line (BEOL) interconnect structure
Patent number
9,059,259
Issue date
Jun 16, 2015
Taiwan Semiconductor Manufacturing Company Limited
Joung-Wei Liou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method and equipment for removing photoresist residue after dry etch
Patent number
9,048,268
Issue date
Jun 2, 2015
Taiwan Semiconductor Manufacturing Co., Ltd.
Mu-Chen Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
ILD stack with improved CMP results
Patent number
6,869,836
Issue date
Mar 22, 2005
Taiwan Semiconductor Manufacturing Co., Ltd
Han-Ti Hsiaw
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
Semiconductor Device and Methods of Manufacture
Publication number
20220328316
Publication date
Oct 13, 2022
Taiwan Semiconductor Manufacturing Co., Ltd.
Jung-Shiung Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Isolation Regions Including Two Layers and Method Forming Same
Publication number
20210296160
Publication date
Sep 23, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Tsung Han Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
SEMICONDUCTOR DEVICE AND METHODS OF MANUFACTURE
Publication number
20200357645
Publication date
Nov 12, 2020
Taiwan Semiconductor Manufacturing Co., Ltd.
Jung-Shiung Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Contact Openings and Methods Forming Same
Publication number
20200111705
Publication date
Apr 9, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Hung Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Device and Methods of Manufacture
Publication number
20200090939
Publication date
Mar 19, 2020
Taiwan Semiconductor Manufacturing Company, Ltd.
Jung-Shiung Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Device and Methods of Manufacture
Publication number
20190096678
Publication date
Mar 28, 2019
Taiwan Semiconductor Manufacturing Company, Ltd.
Jung-Shiung Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Integrated Bi-Layer STI Deposition
Publication number
20180226291
Publication date
Aug 9, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Tsung Han Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Device and Methods of Manufacture
Publication number
20180151373
Publication date
May 31, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Jung-Shiung Tsai
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Contact Openings and Methods Forming Same
Publication number
20180151425
Publication date
May 31, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Chih-Hung Sun
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Semiconductor Device and Method
Publication number
20180145131
Publication date
May 24, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuan-Cheng Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
Integrated Bi-Layer STI Deposition
Publication number
20180005870
Publication date
Jan 4, 2018
Taiwan Semiconductor Manufacturing Company, Ltd.
Tsung Han Hsu
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
OPTICAL FILTERING FOR INTEGRATED DIELECTRICS UV CURING PROCESSES
Publication number
20170316936
Publication date
Nov 2, 2017
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuan-Cheng Wang
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
Flowable Films and Methods of Forming Flowable Films
Publication number
20170053798
Publication date
Feb 23, 2017
Taiwan Semiconductor Manufacturing Company, Ltd.
Kuan-Cheng Wang
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF FORMING A HIGH DENSITY DIELECTRIC ETCH-STOP LAYER
Publication number
20150311158
Publication date
Oct 29, 2015
Taiwan Semiconductor Manufacturing Co., LTD
Joung-Wei Liou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND EQUIPMENT FOR REMOVING PHOTORESIST RESIDUE AFER DRY ETCH
Publication number
20150249024
Publication date
Sep 3, 2015
Taiwan Semiconductor Manufacturing Co., LTD
Mu-Chen Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
High Density Dielectric Etch Stop Layer
Publication number
20150097288
Publication date
Apr 9, 2015
Taiwan Semiconductor Manufacturing Co., LTD
Joung-Wei Liou
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
HARD MASK FOR BACK-END-OF-LINE (BEOL) INTERCONNECT STRUCTURE
Publication number
20150021779
Publication date
Jan 22, 2015
Taiwan Semiconductor Manufacturing Company Limited
JOUNG-WEI LIOU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD OF BACK-END-OF-LINE (BEOL) FABRICATION, AND DEVICES FORMED B...
Publication number
20140264870
Publication date
Sep 18, 2014
Taiwan Semiconductor Manufacturing Co., LTD
Shiauhan WU
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD AND EQUIPMENT FOR REMOVING PHOTORESIST RESIDUE AFTER DRY ETCH
Publication number
20140256138
Publication date
Sep 11, 2014
Taiwan Semiconductor Manufacturing Co., LTD
Mu-Chen Chen
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
ILD STACK WITH IMPROVED CMP RESULTS
Publication number
20050070058
Publication date
Mar 31, 2005
Taiwan Semiconductor Manufacturing Co., Ltd.
Han-Ti Hsiaw
H01 - BASIC ELECTRIC ELEMENTS