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Han Wah Ng
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Johor, MY
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last 30 patents
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Patent Grant
Method of controlled low-k via etch for Cu interconnections
Patent number
7,906,426
Issue date
Mar 15, 2011
GLOBALFOUNDRIES Singapore Pte. Ltd.
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS
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last 30 patents
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Patent Application
Method of controlled low-k via etch for Cu interconnections
Publication number
20080258308
Publication date
Oct 23, 2008
Wuping Liu
H01 - BASIC ELECTRIC ELEMENTS