Han-Wen Liao

Person

Taichung City, TW

People

Patents Grantslast 30 patents

Information Patent Grant
Reducing metal gate overhang by forming a top-wide bottom-narrow du...
- Patent number 12,142,664
- Issue date Nov 12, 2024
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih Wei Bih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor structure and planarization method thereof
- Patent number 11,626,315
- Issue date Apr 11, 2023
- Taiwan Semiconductor Manufacturing Co., Ltd
- Chun-Jung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Composite plasma modulator for plasma chamber
- Patent number 11,367,591
- Issue date Jun 21, 2022
- Taiwan Semiconductor Manufacturing Co., Ltd
- Han-Wen Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Semiconductor device and manufacturing method thereof
- Patent number 11,011,426
- Issue date May 18, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd
- Han-Wen Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma processing apparatus and manufacturing method using the same
- Patent number 10,879,052
- Issue date Dec 29, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Han-Wen Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cluster tool and manufacuturing method of semiconductor structure u...
- Patent number 10,872,760
- Issue date Dec 22, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Han-Wen Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Wet etch apparatus and method for using the same
- Patent number 10,872,788
- Issue date Dec 22, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd
- Hong-Ting Lu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Methods of enhancing surface topography on a substrate for inspection
- Patent number 10,504,737
- Issue date Dec 10, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd
- Han-Wen Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Reducing metal gate overhang by forming a top-wide bottom-narrow du...
- Patent number 10,446,662
- Issue date Oct 15, 2019
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih Wei Bih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Plasma distribution control
- Patent number 10,026,638
- Issue date Jul 17, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Han-Wen Liao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Target dimension uniformity for semiconductor wafers
- Patent number 9,412,606
- Issue date Aug 9, 2016
- Taiwan Semiconductor Manufacturing Company Limited
- Han-Wen Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Uniformity in wafer patterning using feedback control
- Patent number 9,362,185
- Issue date Jun 7, 2016
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung-Hsi Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Hard mask reshaping
- Patent number 9,324,578
- Issue date Apr 26, 2016
- Taiwan Semiconductor Manufacturing Company Limited
- Han-Wen Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method for etching target layer of semiconductor device in etching...
- Patent number 9,087,793
- Issue date Jul 21, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd
- Han-Wen Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Uniformity in wafer patterning using feedback control
- Patent number 9,064,741
- Issue date Jun 23, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung-Hsi Wu
- H01 - BASIC ELECTRIC ELEMENTS

Patents Applicationslast 30 patents

Information Patent Application
Reducing Metal Gate Overhang By Forming A Top-Wide Bottom-Narrow Du...
- Publication number 20210280692
- Publication date Sep 9, 2021
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih Wei Bih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WET ETCH APPARATUS AND METHOD OF USING THE SAME
- Publication number 20200168479
- Publication date May 28, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hong-Ting LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
WET ETCH APPARATUS AND METHOD FOR USING THE SAME
- Publication number 20200168480
- Publication date May 28, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Hong-Ting LU
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF
- Publication number 20200161188
- Publication date May 21, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Han-Wen Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA PROCESSING APPARATUS AND MANUFACTURING METHOD USING THE SAME
- Publication number 20200161102
- Publication date May 21, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Han-Wen Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF ENHANCING SURFACE TOPOGRAPHY ON A SUBSTRATE FOR INSPECTION
- Publication number 20200066538
- Publication date Feb 27, 2020
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Han-Wen Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCING METAL GATE OVERHANG BY FORMING A TOP-WIDE BOTTOM-NARROW DU...
- Publication number 20180350948
- Publication date Dec 6, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Shih Wei Bih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS OF ENHANCING SURFACE TOPOGRAPHY ON A SUBSTRATE FOR INSPECTION
- Publication number 20180350614
- Publication date Dec 6, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Han-Wen Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PLASMA DISTRIBUTION CONTROL
- Publication number 20180174883
- Publication date Jun 21, 2018
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Han-Wen Liao
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
COMPOSITE PLASMA MODULATOR FOR PLASMA CHAMBER
- Publication number 20180158653
- Publication date Jun 7, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Han-Wen Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
SEMICONDUCTOR STRUCTURE AND PLANARIZATION METHOD THEREOF
- Publication number 20180151412
- Publication date May 31, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Chun-Jung Huang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REDUCING METAL GATE OVERHANG BY FORMING A TOP-WIDE BOTTOM-NARROW DU...
- Publication number 20180102418
- Publication date Apr 12, 2018
- Taiwan Semiconductor Manufacturing Co., LTD
- Shih Wei Bih
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLUSTER TOOL AND MANUFACUTURING METHOD OF SEMICONDUCTOR STRUCTURE U...
- Publication number 20180033611
- Publication date Feb 1, 2018
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Han-Wen Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Uniformity in Wafer Patterning using Feedback Control
- Publication number 20150279750
- Publication date Oct 1, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung-Hsi Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
TARGET DIMENSION UNIFORMITY FOR SEMICONDUCTOR WAFERS
- Publication number 20150235877
- Publication date Aug 20, 2015
- Taiwan Semiconductor Manufacturing Company Limited
- Han-Wen Liao
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Uniformity in Wafer Patterning using Feedback Control
- Publication number 20150179531
- Publication date Jun 25, 2015
- Taiwan Semiconductor Manufacturing Company, Ltd.
- Chung-Hsi Wu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD FOR ETCHING TARGET LAYER OF SEMICONDUCTOR DEVICE IN ETCHING...
- Publication number 20150162206
- Publication date Jun 11, 2015
- Taiwan Semiconductor Manufacturing Co., Ltd.
- Han-Wen LIAO
- H01 - BASIC ELECTRIC ELEMENTS

Han-Wen Liao

Person

Patents Grantslast 30 patents

Reducing metal gate overhang by forming a top-wide bottom-narrow du...

Semiconductor structure and planarization method thereof

Composite plasma modulator for plasma chamber

Semiconductor device and manufacturing method thereof

Plasma processing apparatus and manufacturing method using the same

Cluster tool and manufacuturing method of semiconductor structure u...

Wet etch apparatus and method for using the same

Methods of enhancing surface topography on a substrate for inspection

Reducing metal gate overhang by forming a top-wide bottom-narrow du...

Plasma distribution control

Target dimension uniformity for semiconductor wafers

Uniformity in wafer patterning using feedback control

Hard mask reshaping

Method for etching target layer of semiconductor device in etching...

Uniformity in wafer patterning using feedback control

Patents Applicationslast 30 patents

Reducing Metal Gate Overhang By Forming A Top-Wide Bottom-Narrow Du...

WET ETCH APPARATUS AND METHOD OF USING THE SAME

WET ETCH APPARATUS AND METHOD FOR USING THE SAME

SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF

PLASMA PROCESSING APPARATUS AND MANUFACTURING METHOD USING THE SAME

METHODS OF ENHANCING SURFACE TOPOGRAPHY ON A SUBSTRATE FOR INSPECTION

REDUCING METAL GATE OVERHANG BY FORMING A TOP-WIDE BOTTOM-NARROW DU...

METHODS OF ENHANCING SURFACE TOPOGRAPHY ON A SUBSTRATE FOR INSPECTION

PLASMA DISTRIBUTION CONTROL

COMPOSITE PLASMA MODULATOR FOR PLASMA CHAMBER

SEMICONDUCTOR STRUCTURE AND PLANARIZATION METHOD THEREOF

REDUCING METAL GATE OVERHANG BY FORMING A TOP-WIDE BOTTOM-NARROW DU...

CLUSTER TOOL AND MANUFACUTURING METHOD OF SEMICONDUCTOR STRUCTURE U...

Uniformity in Wafer Patterning using Feedback Control

TARGET DIMENSION UNIFORMITY FOR SEMICONDUCTOR WAFERS

Uniformity in Wafer Patterning using Feedback Control

METHOD FOR ETCHING TARGET LAYER OF SEMICONDUCTOR DEVICE IN ETCHING...