Han Xu

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Lexington, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Dry polymer and oxide veil removal for post etch cleaning
- Patent number 6,479,396
- Issue date Nov 12, 2002
- Infineon Technologies Richmond, LP
- Han Xu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Metals removal process
- Patent number 6,083,413
- Issue date Jul 4, 2000
- Massachusetts Institute of Technology
- Herbert H. Sawin
- B08 - CLEANING
Information Patent Grant
Cleaning and stripping of photoresist from surfaces of semiconducto...
- Patent number 5,908,319
- Issue date Jun 1, 1999
- Ulvac Technologies, Inc.
- Han Xu
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY
Information Patent Grant
Processes for cleaning and stripping photoresist from surfaces of s...
- Patent number 5,882,489
- Issue date Mar 16, 1999
- Ulvac Technologies, Inc.
- Richard L. Bersin
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Cold processes for cleaning and stripping photoresist from surfaces...
- Patent number 5,795,831
- Issue date Aug 18, 1998
- Ulvac Technologies, Inc.
- Izumi Nakayama
- G03 - PHOTOGRAPHY CINEMATOGRAPHY ELECTROGRAPHY HOLOGRAPHY