Han Zhang

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Beverly, MA, US

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Patents Grantslast 30 patents

Information Patent Grant
Material transport systems using autonomous controls
- Patent number 8,073,559
- Issue date Dec 6, 2011
- Varian Semiconductor Equipment Associates, Inc.
- Han Zhang
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
MATERIAL TRANSPORT SYSTEMS USING AUTONOMOUS CONTROLS
- Publication number 20090319073
- Publication date Dec 24, 2009
- Han Zhang
- G05 - CONTROLLING REGULATING