Hang Zhang

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Tempe, AZ, US

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Patents Applicationslast 30 patents

Information Patent Application
APPARATUS FOR A SUBSTRATE SUPPORT WITH MULTI-ZONE CONTROL
- Publication number 20250210407
- Publication date Jun 26, 2025
- ASM IP HOLDING B.V.
- Shubham Garg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL SWITCH FOR WAFER TEMPERATURE MODULATION
- Publication number 20250079234
- Publication date Mar 6, 2025
- ASM IP HOLDING B.V.
- Hang Zhang
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR A SUSCEPTOR ASSEMBLY
- Publication number 20250079223
- Publication date Mar 6, 2025
- ASM IP HOLDING B.V.
- Shubham Garg
- H01 - BASIC ELECTRIC ELEMENTS