HANH D. NGUYEN

Person

San Jose, CA, US

People

Patents Grantslast 30 patents

Information Patent Grant
Flow control features of CVD chambers
- Patent number 12,146,219
- Issue date Nov 19, 2024
- Applied Materials, Inc.
- Kien N. Chuc
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Modular high-frequency source
- Patent number 12,002,654
- Issue date Jun 4, 2024
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular high-frequency source with integrated gas distribution
- Patent number 11,501,955
- Issue date Nov 15, 2022
- Applied Materials, Inc.
- Hanh Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Thermal break for high-frequency antennae
- Patent number 11,488,796
- Issue date Nov 1, 2022
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Remote modular high-frequency source
- Patent number 11,393,661
- Issue date Jul 19, 2022
- Applied Materials, Inc.
- Hanh Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular high-frequency source
- Patent number 11,081,317
- Issue date Aug 3, 2021
- Applied Materials, Inc.
- Thai Cheng Chua
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Modular high-frequency source with integrated gas distribution
- Patent number 10,943,768
- Issue date Mar 9, 2021
- Applied Materials, Inc.
- Hanh Nguyen
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flow control features of CVD chambers
- Patent number 10,550,472
- Issue date Feb 4, 2020
- Applied Materials, Inc.
- Kien N. Chuc
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus for coupling a hot wire source to a process chamber
- Patent number 10,269,593
- Issue date Apr 23, 2019
- Applied Materials, Inc.
- Joe Griffith Cruz
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Showerhead designs of a hot wire chemical vapor deposition (HWCVD)...
- Patent number 9,416,450
- Issue date Aug 16, 2016
- Applied Materials, Inc.
- Hanh D. Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Gas distribution system
- Patent number 9,206,512
- Issue date Dec 8, 2015
- Applied Materials, Inc.
- Hanh D. Nguyen
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Apparatus and method for controlling edge performance in an inducti...
- Patent number 8,999,106
- Issue date Apr 7, 2015
- Applied Materials, Inc.
- Wei Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Flow control features of CVD chambers
- Patent number 8,894,767
- Issue date Nov 25, 2014
- Applied Materials, Inc.
- Kien N. Chuc
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Dual zone gas injection nozzle
- Patent number 8,137,463
- Issue date Mar 20, 2012
- Applied Materials, Inc.
- Wei Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Method of correcting baseline skew by a novel motorized source coil...
- Patent number 8,062,472
- Issue date Nov 22, 2011
- Applied Materials, Inc.
- Wei Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Prevention of ground fault interrupts in a semiconductor processing...
- Patent number 6,110,322
- Issue date Aug 29, 2000
- Applied Materials, Inc.
- Hong Bee Teoh
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

Patents Applicationslast 30 patents

Information Patent Application
MODULAR HIGH-FREQUENCY SOURCE
- Publication number 20240282554
- Publication date Aug 22, 2024
- Applied Materials, Inc.
- Thai Cheng CHUA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
REMOTE MODULAR HIGH-FREQUENCY SOURCE
- Publication number 20220319812
- Publication date Oct 6, 2022
- Applied Materials, Inc.
- Hanh NGUYEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
CLEAN UNIT FOR CHAMBER EXHAUST CLEANING
- Publication number 20210391156
- Publication date Dec 16, 2021
- Applied Materials, Inc.
- Kelvin Chan
- B08 - CLEANING
Information Patent Application
MODULAR HIGH-FREQUENCY SOURCE
- Publication number 20210327685
- Publication date Oct 21, 2021
- Applied Materials, Inc.
- Thai Cheng CHUA
- H03 - BASIC ELECTRONIC CIRCUITRY
Information Patent Application
MODULAR HIGH-FREQUENCY SOURCE WITH INTEGRATED GAS DISTRIBUTION
- Publication number 20210183621
- Publication date Jun 17, 2021
- Applied Materials, Inc.
- Hanh NGUYEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
THERMAL BREAK FOR HIGH-FREQUENCY ANTENNAE
- Publication number 20200343065
- Publication date Oct 29, 2020
- Applied Materials, Inc.
- Thai Cheng CHUA
- H05 - ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
Information Patent Application
FLOW CONTROL FEATURES OF CVD CHAMBERS
- Publication number 20200149166
- Publication date May 14, 2020
- Applied Materials, Inc.
- Kien N. CHUC
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
REMOTE MODULAR HIGH-FREQUENCY SOURCE
- Publication number 20190326098
- Publication date Oct 24, 2019
- Applied Materials, Inc.
- Hanh NGUYEN
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
MODULAR HIGH-FREQUENCY SOURCE
- Publication number 20190326095
- Publication date Oct 24, 2019
- Applied Materials, Inc.
- Thai Cheng CHUA
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS FOR COUPLING A HOT WIRE SOURCE TO A PROCESS CHAMBER
- Publication number 20160005631
- Publication date Jan 7, 2016
- Applied Materials, Inc.
- Joe GRIFFITH CRUZ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHODS AND APPARATUS FOR CLEANING SUBSTRATE SURFACES WITH ATOMIC H...
- Publication number 20150311061
- Publication date Oct 29, 2015
- Applied Materials, Inc.
- JOE GRIFFITH CRUZ
- B08 - CLEANING
Information Patent Application
FLOW CONTROL FEATURES OF CVD CHAMBERS
- Publication number 20150013793
- Publication date Jan 15, 2015
- Applied Materials, Inc.
- Kien N. CHUC
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
SHOWERHEAD DESIGNS OF A HOT WIRE CHEMICAL VAPOR DEPOSITION (HWCVD)...
- Publication number 20140113084
- Publication date Apr 24, 2014
- Applied Materials, Inc.
- HANH D. NGUYEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
METHODS AND APPARATUS FOR CLEANING SUBSTRATE SURFACES WITH ATOMIC H...
- Publication number 20130160794
- Publication date Jun 27, 2013
- Applied Materials, Inc.
- JOE GRIFFITH CRUZ
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
GAS DISTRIBUTION SYSTEM
- Publication number 20120325149
- Publication date Dec 27, 2012
- Applied Materials, Inc.
- HANH D. NGUYEN
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL ZONE GAS INJECTION NOZZLE
- Publication number 20120164845
- Publication date Jun 28, 2012
- Applied Materials, Inc.
- Wei Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
FLOW CONTROL FEATURES OF CVD CHAMBERS
- Publication number 20110011338
- Publication date Jan 20, 2011
- Applied Materials, Inc.
- Kien N. Chuc
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
DUAL ZONE GAS INJECTION NOZZLE
- Publication number 20090159424
- Publication date Jun 25, 2009
- Wei Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR CONTROLLING EDGE PERFORMANCE IN AN INDUCTI...
- Publication number 20090162952
- Publication date Jun 25, 2009
- APPLIED MATERIALS, INC.
- Wei Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
METHOD OF CORRECTING BASELINE SKEW BY A NOVEL MOTORIZED SOURCE COIL...
- Publication number 20090159425
- Publication date Jun 25, 2009
- APPLIED MATERIALS, INC.
- Wei Liu
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
APPARATUS AND METHOD FOR PROCESSING A SUBSTRATE USING INDUCTIVELY C...
- Publication number 20090162570
- Publication date Jun 25, 2009
- APPLIED MATERIALS, INC.
- Johanes F. Swenberg
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Dual gas faceplate for a showerhead in a semiconductor wafer proces...
- Publication number 20060021703
- Publication date Feb 2, 2006
- APPLIED MATERIALS, INC.
- Salvador P. Umotoy
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
.METHOD OF CVD TITANIUM NITRIDE FILM DEPOSITION FOR INCREASED TITAN...
- Publication number 20030017268
- Publication date Jan 23, 2003
- APPLIED MATERIALS, INC.
- Jianhua Hu
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...

HANH D. NGUYEN

Person

Patents Grantslast 30 patents

Flow control features of CVD chambers

Modular high-frequency source

Modular high-frequency source with integrated gas distribution

Thermal break for high-frequency antennae

Remote modular high-frequency source

Modular high-frequency source

Modular high-frequency source with integrated gas distribution

Flow control features of CVD chambers

Apparatus for coupling a hot wire source to a process chamber

Showerhead designs of a hot wire chemical vapor deposition (HWCVD)...

Gas distribution system

Apparatus and method for controlling edge performance in an inducti...

Flow control features of CVD chambers

Dual zone gas injection nozzle

Method of correcting baseline skew by a novel motorized source coil...

Prevention of ground fault interrupts in a semiconductor processing...

Patents Applicationslast 30 patents

MODULAR HIGH-FREQUENCY SOURCE

REMOTE MODULAR HIGH-FREQUENCY SOURCE

CLEAN UNIT FOR CHAMBER EXHAUST CLEANING

MODULAR HIGH-FREQUENCY SOURCE

MODULAR HIGH-FREQUENCY SOURCE WITH INTEGRATED GAS DISTRIBUTION

THERMAL BREAK FOR HIGH-FREQUENCY ANTENNAE

FLOW CONTROL FEATURES OF CVD CHAMBERS

REMOTE MODULAR HIGH-FREQUENCY SOURCE

MODULAR HIGH-FREQUENCY SOURCE

APPARATUS FOR COUPLING A HOT WIRE SOURCE TO A PROCESS CHAMBER

METHODS AND APPARATUS FOR CLEANING SUBSTRATE SURFACES WITH ATOMIC H...

FLOW CONTROL FEATURES OF CVD CHAMBERS

SHOWERHEAD DESIGNS OF A HOT WIRE CHEMICAL VAPOR DEPOSITION (HWCVD)...

METHODS AND APPARATUS FOR CLEANING SUBSTRATE SURFACES WITH ATOMIC H...

GAS DISTRIBUTION SYSTEM

DUAL ZONE GAS INJECTION NOZZLE

FLOW CONTROL FEATURES OF CVD CHAMBERS

DUAL ZONE GAS INJECTION NOZZLE

APPARATUS AND METHOD FOR CONTROLLING EDGE PERFORMANCE IN AN INDUCTI...

METHOD OF CORRECTING BASELINE SKEW BY A NOVEL MOTORIZED SOURCE COIL...

APPARATUS AND METHOD FOR PROCESSING A SUBSTRATE USING INDUCTIVELY C...

Dual gas faceplate for a showerhead in a semiconductor wafer proces...

.METHOD OF CVD TITANIUM NITRIDE FILM DEPOSITION FOR INCREASED TITAN...