Hanish Kumar PANAVALAPPIL KUMARANKUTTY

Person

Bangalore, IN

People

Patents Grantslast 30 patents

Information Patent Grant
Atomic layer deposition part coating chamber
- Patent number 12,074,010
- Issue date Aug 27, 2024
- Applied Materials, Inc.
- Michael R. Rice
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Lid assembly apparatus and methods for substrate processing chambers
- Patent number 11,598,004
- Issue date Mar 7, 2023
- Applied Materials, Inc.
- Hanish Kumar Panavalappil Kumarankutty
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method and apparatus for semiconductor processing chamber isolation...
- Patent number 10,679,827
- Issue date Jun 9, 2020
- Applied Materials, Inc.
- Gopu Krishna
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Amalgamated cover ring
- Patent number 10,515,843
- Issue date Dec 24, 2019
- Applied Materials, Inc.
- Govinda Raj
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Integrated substrate temperature measurement on high temperature ce...
- Patent number 10,510,567
- Issue date Dec 17, 2019
- Applied Materials, Inc.
- Yizhen Zhang
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
On-board metrology (OBM) design and implication in process tool
- Patent number 10,388,549
- Issue date Aug 20, 2019
- Applied Materials, Inc.
- Khokan C. Paul
- G05 - CONTROLLING REGULATING

Patents Applicationslast 30 patents

Information Patent Application
ATOMIC LAYER DEPOSITION PART COATING CHAMBER
- Publication number 20240420926
- Publication date Dec 19, 2024
- Applied Materials, Inc.
- Michael R. RICE
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PROCESSING CHAMBER WITH GAS RECYCLING
- Publication number 20240368764
- Publication date Nov 7, 2024
- APPLIED MATERIALS,INC.
- Michael Robert Rice
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION COATING SYSTEM FOR INNER WALLS OF GAS LINES
- Publication number 20240117491
- Publication date Apr 11, 2024
- Hanish Kumar PANAVALAPPIL KUMARANKUTTY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ATOMIC LAYER DEPOSITION PART COATING CHAMBER
- Publication number 20240093367
- Publication date Mar 21, 2024
- Sriharsha DHARMAPURA SATHYANARAYANAMURTHY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
HEATED LID FOR A PROCESS CHAMBER
- Publication number 20230073150
- Publication date Mar 9, 2023
- Shivaprakash Padadayya HIREMATH
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ATOMIC LAYER DEPOSITION PART COATING CHAMBER
- Publication number 20230074149
- Publication date Mar 9, 2023
- Applied Materials, Inc.
- Michael R. RICE
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
ELECTROSTATIC CHUCK WITH IMPROVED TEMPERATURE CONTROL
- Publication number 20220005723
- Publication date Jan 6, 2022
- Applied Materials, Inc.
- Hanish Kumar Panavalappil Kumarankutty
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
LID ASSEMBLY APPARATUS AND METHODS FOR SUBSTRATE PROCESSING CHAMBERS
- Publication number 20200291522
- Publication date Sep 17, 2020
- Applied Materials, Inc.
- Hanish Kumar PANAVALAPPIL KUMARANKUTTY
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SUBSTRATE TEMPERATURE MEASUREMENT ON HIGH TEMPERATURE CE...
- Publication number 20200118850
- Publication date Apr 16, 2020
- Applied Materials, Inc.
- Yizhen ZHANG
- G01 - MEASURING TESTING
Information Patent Application
APPARATUS FOR SUPPRESSING PARASITIC PLASMA IN PLASMA ENHANCED CHEMI...
- Publication number 20190378696
- Publication date Dec 12, 2019
- Applied Materials, Inc.
- Sai Susmita ADDEPALLI
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
INTEGRATED SUBSTRATE TEMPERATURE MEASUREMENT ON HIGH TEMPERATURE CE...
- Publication number 20180323093
- Publication date Nov 8, 2018
- Applied Materials, Inc.
- Yizhen ZHANG
- G02 - OPTICS
Information Patent Application
METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESSING CHAMBER ISOLATION...
- Publication number 20180211820
- Publication date Jul 26, 2018
- Applied Materials, Inc.
- Gopu KRISHNA
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Application
AMALGAMATED COVER RING
- Publication number 20170162422
- Publication date Jun 8, 2017
- Applied Materials, Inc.
- Govinda RAJ
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
ON-BOARD METROLOGY (OBM) DESIGN AND IMPLICATION IN PROCESS TOOL
- Publication number 20170148654
- Publication date May 25, 2017
- Applied Materials, Inc.
- Khokan C. PAUL
- H01 - BASIC ELECTRIC ELEMENTS

Hanish Kumar PANAVALAPPIL KUMARANKUTTY

Person

Patents Grantslast 30 patents

Atomic layer deposition part coating chamber

Lid assembly apparatus and methods for substrate processing chambers

Method and apparatus for semiconductor processing chamber isolation...

Amalgamated cover ring

Integrated substrate temperature measurement on high temperature ce...

On-board metrology (OBM) design and implication in process tool

Patents Applicationslast 30 patents

ATOMIC LAYER DEPOSITION PART COATING CHAMBER

PROCESSING CHAMBER WITH GAS RECYCLING

ATOMIC LAYER DEPOSITION COATING SYSTEM FOR INNER WALLS OF GAS LINES

ATOMIC LAYER DEPOSITION PART COATING CHAMBER

HEATED LID FOR A PROCESS CHAMBER

ATOMIC LAYER DEPOSITION PART COATING CHAMBER

ELECTROSTATIC CHUCK WITH IMPROVED TEMPERATURE CONTROL

LID ASSEMBLY APPARATUS AND METHODS FOR SUBSTRATE PROCESSING CHAMBERS

INTEGRATED SUBSTRATE TEMPERATURE MEASUREMENT ON HIGH TEMPERATURE CE...

APPARATUS FOR SUPPRESSING PARASITIC PLASMA IN PLASMA ENHANCED CHEMI...

INTEGRATED SUBSTRATE TEMPERATURE MEASUREMENT ON HIGH TEMPERATURE CE...

METHOD AND APPARATUS FOR SEMICONDUCTOR PROCESSING CHAMBER ISOLATION...

AMALGAMATED COVER RING

ON-BOARD METROLOGY (OBM) DESIGN AND IMPLICATION IN PROCESS TOOL