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Patents Grants
last 30 patents
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Patent Grant
Heating platform, thermal treatment and manufacturing method
Patent number
11,107,708
Issue date
Aug 31, 2021
Taiwan Semiconductor Manufacturing Company, Ltd
Hsiao-Hua Peng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Apparatus and method for controlling wafer uniformity
Patent number
11,062,886
Issue date
Jul 13, 2021
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsiao-Hua Peng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Grant
Method for determining applicabilty of a processing device, a proce...
Patent number
9,639,774
Issue date
May 2, 2017
Taiwan Semiconductor Manufacturing Co., Ltd
Ching-Hsi Nan
G06 - COMPUTING CALCULATING COUNTING
Information
Patent Grant
Methods of forming semiconductor structures and systems for forming...
Patent number
7,589,005
Issue date
Sep 15, 2009
Taiwan Semiconductor Manufacturing Co., Ltd.
Chia-Tsung Tso
H01 - BASIC ELECTRIC ELEMENTS
Patents Applications
last 30 patents
Information
Patent Application
HEATING PLATFORM, THERMAL TREATMENT AND MANUFACTURING METHOD
Publication number
20210327730
Publication date
Oct 21, 2021
Taiwan Semiconductor Manufacturing Company, Ltd.
Hsiao-Hua Peng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR CONTROLLING WAFER UNIFORMITY
Publication number
20210296100
Publication date
Sep 23, 2021
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Hsiao-Hua Peng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
APPARATUS AND METHOD FOR CONTROLLING WAFER UNIFORMITY
Publication number
20190164730
Publication date
May 30, 2019
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
Hsiao-Hua Peng
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
HEATING PLATFORM, THERMAL TREATMENT AND MANUFACTURING METHOD
Publication number
20190148185
Publication date
May 16, 2019
Taiwan Semiconductor Manufacturing Co., Ltd.
Hsiao-Hua Peng
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
METHOD FOR DETERMINING APPLICABILTY OF A PROCESSING DEVICE, A PROCE...
Publication number
20140161361
Publication date
Jun 12, 2014
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
Ching-Hsi NAN
G01 - MEASURING TESTING
Information
Patent Application
METHODS OF FORMING SEMICONDUCTOR STRUCTURES AND SYSTEMS FOR FORMING...
Publication number
20080081441
Publication date
Apr 3, 2008
Taiwan Semiconductor Manufacturing Co., LTD
Chia-Tsung Tso
H01 - BASIC ELECTRIC ELEMENTS