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Hannes HECHT
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Burghausen, DE
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Patents Grants
last 30 patents
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Patent Grant
Device for handling a semiconductor wafer in an epitaxy reactor and...
Patent number
11,302,565
Issue date
Apr 12, 2022
Siltronic AG
Patrick Moos
C30 - CRYSTAL GROWTH
Patents Applications
last 30 patents
Information
Patent Application
METHOD OF PRODUCING EPITAXIAL LAYER WAFERS IN A CHAMBER OF A DEPOSI...
Publication number
20240150932
Publication date
May 9, 2024
Siltronic AG
Hannes Hecht
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
APPARATUS AND METHOD FOR DEPOSITING A LAYER OF SEMICONDUCTOR MATERI...
Publication number
20230287569
Publication date
Sep 14, 2023
Siltronic AG
Hannes HECHT
C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information
Patent Application
METHOD AND DEVICE FOR DEPOSITING AN EPITAXIAL LAYER ON A SUBSTRATE...
Publication number
20230178398
Publication date
Jun 8, 2023
Siltronic AG
Thomas STETTNER
H01 - BASIC ELECTRIC ELEMENTS
Information
Patent Application
DEVICE FOR HANDLING A SEMICONDUCTOR WAFER IN AN EPITAXY REACTOR AND...
Publication number
20190311941
Publication date
Oct 10, 2019
Siltronic AG
Patrick MOOS
C30 - CRYSTAL GROWTH