Hannu Helle

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Tampere, FI

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Patents Grantslast 30 patents

Information Patent Grant
Micromechanical sensor, sensor array and method
- Patent number 8,136,403
- Issue date Mar 20, 2012
- Valtion teknillinen Tutkimuskeskus
- Heikki Seppa
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
Micromechanical Sensor, Sensor Array and Method
- Publication number 20090277271
- Publication date Nov 12, 2009
- Valtion teknillinen tutkimuskeskus
- Heikki Seppa
- B81 - MICRO-STRUCTURAL TECHNOLOGY