Hans Artmann

Person

Boeblingen-Dagersheim, DE

People

Patents Grantslast 30 patents

Information Patent Grant
Micromechanical component for a capacitive pressure sensor device
- Patent number 11,976,996
- Issue date May 7, 2024
- Robert Bosch GmbH
- Thomas Friedrich
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component for a capacitive pressure sensor device
- Patent number 11,940,345
- Issue date Mar 26, 2024
- Robert Bosch GmbH
- Thomas Friedrich
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and method for manufacturing a micromecha...
- Patent number 11,912,563
- Issue date Feb 27, 2024
- Robert Bosch GmbH
- Hans Artmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for sealing entries in a MEMS element
- Patent number 11,851,324
- Issue date Dec 26, 2023
- Robert Bosch GmbH
- Christoph Hermes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Pivot apparatus for a micromirror, and illumination apparatus havin...
- Patent number 10,914,937
- Issue date Feb 9, 2021
- Robert Bosch GmbH
- Johannes Classen
- G02 - OPTICS
Information Patent Grant
Method for producing a multilayer MEMS component, and corresponding...
- Patent number 10,427,937
- Issue date Oct 1, 2019
- Robert Bosch GmbH
- Arnd Kaelberer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Etching device and etching method
- Patent number 10,020,169
- Issue date Jul 10, 2018
- Robert Bosch GmbH
- Arnd Kaelberer
- C23 - COATING METALLIC MATERIAL COATING MATERIAL WITH METALLIC MATERIAL CHEMI...
Information Patent Grant
Method for manufacturing microelectromechanical structures in a lay...
- Patent number 9,932,223
- Issue date Apr 3, 2018
- Robert Bosch GmbH
- Hans Artmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Comb drive including a pivotable mirror element
- Patent number 9,372,341
- Issue date Jun 21, 2016
- Robert Bosch GmbH
- Hans Artmann
- G02 - OPTICS
Information Patent Grant
Micromechanical component and method for producing a micromechanica...
- Patent number 9,309,111
- Issue date Apr 12, 2016
- Robert Bosch GmbH
- Hans Artmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a semiconductor component and a semiconductor...
- Patent number RE44995
- Issue date Jul 8, 2014
- Robert Bosch GmbH
- Hubert Benzel
- 216 - Etching a substrate: processes
Information Patent Grant
Method for manufacturing a micromechanical component, and micromech...
- Patent number 8,481,427
- Issue date Jul 9, 2013
- Robert Bosch GmbH
- Hans Artmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Layer structure for electrical contacting of semiconductor components
- Patent number 8,299,549
- Issue date Oct 30, 2012
- Robert Bosch GmbH
- Jochen Reinmuth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Grant
Pressure sensor
- Patent number 8,196,474
- Issue date Jun 12, 2012
- Robert Bosch GmbH
- Jochen Reinmuth
- G01 - MEASURING TESTING
Information Patent Grant
Method for producing a semiconductor component and a semiconductor...
- Patent number 8,123,963
- Issue date Feb 28, 2012
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and method for producing a micromechanica...
- Patent number 8,076,739
- Issue date Dec 13, 2011
- Robert Bosch GmbH
- Peter Schmollngruber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Sensor element for capacitive differential-pressure sensing
- Patent number 7,992,443
- Issue date Aug 9, 2011
- Robert Bosch GmbH
- Bernhard Opitz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component and corresponding production method
- Patent number 7,833,405
- Issue date Nov 16, 2010
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Structural element having a porous region at least regionally provi...
- Patent number 7,709,933
- Issue date May 4, 2010
- Robert Bosch GmbH
- Hans Artmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for manufacturing a semiconductor component and a semiconduc...
- Patent number 7,679,154
- Issue date Mar 16, 2010
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component having a diaphragm
- Patent number 7,495,302
- Issue date Feb 24, 2009
- Robert Bosch GmbH
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a semiconductor component and a semiconductor...
- Patent number 7,479,232
- Issue date Jan 20, 2009
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing optically transparent regions in a silicon sub...
- Patent number 7,419,581
- Issue date Sep 2, 2008
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Method for producing a semiconductor component and a semiconductor...
- Patent number 7,306,966
- Issue date Dec 11, 2007
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Micromechanical component, in particular a sensor element, having a...
- Patent number 7,276,277
- Issue date Oct 2, 2007
- Robert Bosch GmbH
- Hans Artmann
- G01 - MEASURING TESTING
Information Patent Grant
Sensor with at least one micromechanical structure, and method for...
- Patent number 7,273,764
- Issue date Sep 25, 2007
- Robert Bosch GmbH
- Frank Reichenbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Semiconductor component, particularly a micromechanical pressure se...
- Patent number 7,057,248
- Issue date Jun 6, 2006
- Robert Bosch GmbH
- Helmut Sautter
- G01 - MEASURING TESTING
Information Patent Grant
Method for producing micromechanic sensors and sensors produced by...
- Patent number 7,045,382
- Issue date May 16, 2006
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Grant
Flow sensor
- Patent number 7,040,160
- Issue date May 9, 2006
- Robert Bosch GmbH
- Hans Artmann
- G01 - MEASURING TESTING
Information Patent Grant
Method for production of a semiconductor component and a semiconduc...
- Patent number 7,037,438
- Issue date May 2, 2006
- Robert Bosch GmbH
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY

Patents Applicationslast 30 patents

Information Patent Application
SENSOR DEVICE AND METHOD FOR PRODUCING A SENSOR DEVICE
- Publication number 20220090975
- Publication date Mar 24, 2022
- Heribert Weber
- G01 - MEASURING TESTING
Information Patent Application
MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE
- Publication number 20220003621
- Publication date Jan 6, 2022
- ROBERT BOSCH GmbH
- Thomas Friedrich
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR SEALING ENTRIES IN A MEMS ELEMENT
- Publication number 20220002147
- Publication date Jan 6, 2022
- ROBERT BOSCH GmbH
- Christoph Hermes
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR DEVICE AND METHOD FOR PRODUCING A SENSOR DEVICE
- Publication number 20210403315
- Publication date Dec 30, 2021
- ROBERT BOSCH GmbH
- Hans ARTMANN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR MANUFACTURING A MICROMECHA...
- Publication number 20210395074
- Publication date Dec 23, 2021
- ROBERT BOSCH GmbH
- Hans Artmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE
- Publication number 20200200631
- Publication date Jun 25, 2020
- ROBERT BOSCH GmbH
- Thomas Friedrich
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
METHOD FOR PRODUCING A MULTILAYER MEMS COMPONENT, AND CORRESPONDING...
- Publication number 20190016590
- Publication date Jan 17, 2019
- ROBERT BOSCH GmbH
- Arnd Kaelberer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
ETCHING DEVICE AND ETCHING METHOD
- Publication number 20170207067
- Publication date Jul 20, 2017
- ROBERT BOSCH GmbH
- Arnd Kaelberer
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
PIVOT APPARATUS FOR A MICROMIRROR, AND ILLUMINATION APPARATUS HAVIN...
- Publication number 20170059852
- Publication date Mar 2, 2017
- ROBERT BOSCH GmbH
- Johannes Classen
- G02 - OPTICS
Information Patent Application
METHOD FOR MANUFACTURING MICROELECTROMECHANICAL STRUCTURES IN A LAY...
- Publication number 20160304334
- Publication date Oct 20, 2016
- ROBERT BOSCH GmbH
- Hans Artmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICA...
- Publication number 20150131136
- Publication date May 14, 2015
- ROBERT BOSCH GmbH
- Hans ARTMANN
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING A SEMICONDUCTOR D...
- Publication number 20140151885
- Publication date Jun 5, 2014
- ROBERT BOSCH GmbH
- Peter SCHMOLLNGRUBER
- G01 - MEASURING TESTING
Information Patent Application
LAYER STRUCTURE FOR ELECTRICAL CONTACTING OF SEMICONDUCTOR COMPONENTS
- Publication number 20110127674
- Publication date Jun 2, 2011
- Jochen Reinmuth
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Pressure sensor
- Publication number 20110048137
- Publication date Mar 3, 2011
- Jochen REINMUTH
- G01 - MEASURING TESTING
Information Patent Application
Method for Manufacturing a Micromechanical Component, and Micromec...
- Publication number 20100260974
- Publication date Oct 14, 2010
- Hans Artmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICA...
- Publication number 20100176469
- Publication date Jul 15, 2010
- Peter Schmollngruber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
SENSOR ELEMENT FOR CAPACITIVE DIFFERENTIAL-PRESSURE SENSING
- Publication number 20100170346
- Publication date Jul 8, 2010
- Bernhard Opitz
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for Manufacturing a Diaphragm on a Semiconductor Substrate a...
- Publication number 20100025786
- Publication date Feb 4, 2010
- Peter Schmollngruber
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing a semiconductor component and a semiconductor...
- Publication number 20080286970
- Publication date Nov 20, 2008
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for manufacturing a semcoductor component and a semiconducto...
- Publication number 20080093694
- Publication date Apr 24, 2008
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing a semiconductor component and a semiconductor...
- Publication number 20060014392
- Publication date Jan 19, 2006
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Sensor with at least one micromechanical structure, and method for...
- Publication number 20050230708
- Publication date Oct 20, 2005
- Frank Reichenbach
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Micromechanical component having a diaphragm, and method for manufa...
- Publication number 20050204821
- Publication date Sep 22, 2005
- Frank Fischer
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing a semiconductor component and a semiconductor...
- Publication number 20040266050
- Publication date Dec 30, 2004
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Structural element having a porous region and its use as well as me...
- Publication number 20040188808
- Publication date Sep 30, 2004
- Hans Artmann
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing optically transparent regions in a silicon sub...
- Publication number 20040155010
- Publication date Aug 12, 2004
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Method for producing micromechanic sensors and sensors produced by...
- Publication number 20040152228
- Publication date Aug 5, 2004
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Module, especially a wafer module
- Publication number 20040084398
- Publication date May 6, 2004
- Klaus Breitschwerdt
- H01 - BASIC ELECTRIC ELEMENTS
Information Patent Application
Micromechanical component and corresponding production method
- Publication number 20040080004
- Publication date Apr 29, 2004
- Hubert Benzel
- B81 - MICRO-STRUCTURAL TECHNOLOGY
Information Patent Application
Flow sensor
- Publication number 20040069626
- Publication date Apr 15, 2004
- Hans Artmann
- G01 - MEASURING TESTING

Hans Artmann

Person

Patents Grantslast 30 patents

Micromechanical component for a capacitive pressure sensor device

Micromechanical component for a capacitive pressure sensor device

Micromechanical component and method for manufacturing a micromecha...

Method for sealing entries in a MEMS element

Pivot apparatus for a micromirror, and illumination apparatus havin...

Method for producing a multilayer MEMS component, and corresponding...

Etching device and etching method

Method for manufacturing microelectromechanical structures in a lay...

Comb drive including a pivotable mirror element

Micromechanical component and method for producing a micromechanica...

Method for producing a semiconductor component and a semiconductor...

Method for manufacturing a micromechanical component, and micromech...

Layer structure for electrical contacting of semiconductor components

Pressure sensor

Method for producing a semiconductor component and a semiconductor...

Micromechanical component and method for producing a micromechanica...

Sensor element for capacitive differential-pressure sensing

Micromechanical component and corresponding production method

Structural element having a porous region at least regionally provi...

Method for manufacturing a semiconductor component and a semiconduc...

Micromechanical component having a diaphragm

Method for producing a semiconductor component and a semiconductor...

Method for producing optically transparent regions in a silicon sub...

Method for producing a semiconductor component and a semiconductor...

Micromechanical component, in particular a sensor element, having a...

Sensor with at least one micromechanical structure, and method for...

Semiconductor component, particularly a micromechanical pressure se...

Method for producing micromechanic sensors and sensors produced by...

Flow sensor

Method for production of a semiconductor component and a semiconduc...

Patents Applicationslast 30 patents

SENSOR DEVICE AND METHOD FOR PRODUCING A SENSOR DEVICE

MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE

METHOD FOR SEALING ENTRIES IN A MEMS ELEMENT

SENSOR DEVICE AND METHOD FOR PRODUCING A SENSOR DEVICE

MICROMECHANICAL COMPONENT AND METHOD FOR MANUFACTURING A MICROMECHA...

MICROMECHANICAL COMPONENT FOR A CAPACITIVE PRESSURE SENSOR DEVICE

METHOD FOR PRODUCING A MULTILAYER MEMS COMPONENT, AND CORRESPONDING...

ETCHING DEVICE AND ETCHING METHOD

PIVOT APPARATUS FOR A MICROMIRROR, AND ILLUMINATION APPARATUS HAVIN...

METHOD FOR MANUFACTURING MICROELECTROMECHANICAL STRUCTURES IN A LAY...

MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICA...

SEMICONDUCTOR DEVICE AND METHOD FOR MANUFACTURING A SEMICONDUCTOR D...

LAYER STRUCTURE FOR ELECTRICAL CONTACTING OF SEMICONDUCTOR COMPONENTS

Pressure sensor

Method for Manufacturing a Micromechanical Component, and Micromec...

MICROMECHANICAL COMPONENT AND METHOD FOR PRODUCING A MICROMECHANICA...

SENSOR ELEMENT FOR CAPACITIVE DIFFERENTIAL-PRESSURE SENSING

Method for Manufacturing a Diaphragm on a Semiconductor Substrate a...

Method for producing a semiconductor component and a semiconductor...

Method for manufacturing a semcoductor component and a semiconducto...

Method for producing a semiconductor component and a semiconductor...

Sensor with at least one micromechanical structure, and method for...

Micromechanical component having a diaphragm, and method for manufa...

Method for producing a semiconductor component and a semiconductor...

Structural element having a porous region and its use as well as me...

Method for producing optically transparent regions in a silicon sub...

Method for producing micromechanic sensors and sensors produced by...

Module, especially a wafer module

Micromechanical component and corresponding production method

Flow sensor